1500 Series Research DC Power Supplies & Sputtering Packages
Ion™ 1500 DC Magnetron Power Supply  Ion™ 1500 Series Research DC Power Supplies Sales Brochure PS 700 04/11 Rev. D
Features - Superior Arc Detection & Suppression - < 100 nsecs (.1 µ secs)
- Adjustable Arc Detection Delay & Off Time Before Restarting
- Voltage, Current & Power Regulation Modes
- Adjustable Power Ramping
- Adjustable Run Timer
- Stored Target Parameters for Up to 7 Separate Targets
- kWHr Counting & Time Limit
- RS-232 & Analog Communication Capability
- Wide 0-1000 Volt Range Compared to 0-800 volts Supplied by Competitors - Full Rated Power can be Applied Under Nearly all Conditions
- Stable operation down to 20 watts for non-reactive processes
- Suitable for use as a substrate bias power supply
- No Transformer Tap Changes Are Necessary to Operate Across Entire Range
- Compact, low profile chassis -Saves rack space
- 2 Year Warranty
Complete Sputtering Packages 
Polaris GEN II 2" & 3" Research Sputtering Sources
used in combination with the Ion™ 1500 allow performance
not possible with any other sputtering source & DC power
supply - for example: - Sputter 1/4" [6,35 mm] thick Ni targets
- Deposit insulating films from metallic targets without the use of expensive power supplies in an essentially arc-damage free environment
- Achieve superior target utilization
- Apply virtually full rated output of power supply to source across broad pressure range
- Deposit very thin films at extremely low power levels
Arc Damage is Virtually Eliminated When Arc Detection & Suppression is Activated Click here to download & play flash video of Ion™ 1500 and Polaris Source in Operation -
still images from this video shown below 
Hard arc on Al target in O2 environment on
3" Polaris™ source - no arc suppression 
Same view & conditions as above, but with
plasma re-igniting - arcing is still decaying 
Arc suppression of Ion™ 1500 working in same
environment & conditions - producing a stable
plasma & good target utilization with negligible
arc induced damage. Accessories 
Blocking filters (required when the Ion™ 1500
is used simultaneously with an RF Power Supply) and
switches that allow the sequential use of multiple sputtering
sources from a single power supply are available. DC Pass/RF Blocking Filter Installed on Output of Ion™ 1500 | 
