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 | 300 Watt Low Cost Package for Those With Limited Budgets |
| 13.56 MHz RF Power Generator Allows All Materials to be Sputtered |
| 19" Rack Mount with Power Supply & Integrated Manual Matching Network |
| 2" & 3" Sputtering Sources |
| Power Cable and RF Feedthrough Included |
Description
The Polaris™ 300 package is intended for those wishing to
spend the least amount of money possible for the maximum possible performance
and flexibility.
Everything required to install the Polaris™ internally mounted sputtering source into the users system and connect it with the power generation system is supplied. Included is one of a series of standard feedthrough or flange mounted assemblies, all necessary electrical, water, gas and vacuum hardware and a 3' long shielded cable between the feedthrough assembly and the power supply/matching network. A comprehensive documentation package is provided. Other feedthrough arrangements and cable lengths are possible - please consult the factory.
A 300 watt 13.56 MHz power supply and manually adjusted impedance matching network are integrated into a single, 19" rack mount unit. The manually adjusted impedance matching network provides the user with a broad tuning range. The network includes a series inductor with a field changeable tap and optional fixed shunt capacitors, enabling it to match a wide range of impedances. The RF generator allows precise control from the front panel or via a rear panel analog interface. Power and tuning (capacitor) adjustment are accomplished through the front panel mounted 10-turn, locking potentiometers. A set-point control knob allows the operator to set and vary Forward RF Power or DC Bias. Digital meters display Forward and Reflected Power and DC Bias developed on the source. The external control interface on the back of the unit allows the power generator to be controlled by the user's programmable controller or computer. Safety and functional interlocks are provided, as well as over-temperature protection circuitry. The power generation system incorporates high efficiency switch mode power supplies and solid-state technology. They are very robust and can accept 40% reflected power before they operate in fold-back mode.
Specifications
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Sputtering
Source |
Polaris™ Sputtering Source or Assembly with KF-40 bulkhead flange |
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Target Size |
2" or 3" Diameter |
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Feedthroughs & Mounting Flanges |
Refer to Polaris™ Interface Control Drawings |
| Power Supply |
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AC Mains Input |
95-120 or
187-240 VAC,
Single Phase, 50/60 Hz, 5A maximum |
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RF Output Power |
0-300 watts
into a 50 ohm load |
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Output
Frequency |
13.56 MHz ±
.005% |
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Output
Impedance |
50 W
resistive |
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Output
Connector |
Female BNC to Matching Network (External Connection - cable supplied) |
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Output Power
Stability |
±
.5% of set point |
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Cooling |
Forced air via
a 110 cfm fan |
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Operating
Environment |
Maximum 90%
relative humidity. Maximum
100 degrees F ambient temperature |
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Size – Rack
Mount Power Supply |
19” x 7”
Rack Mount Panel x 16” Deep |
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Weight |
Nominal 22
pounds |
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Impedance
Matching Network |
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RF Output
Connector |
Female HN
Coaxial Cable Connector |
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RF Input
Connector |
Male BNC Coaxial Cable Connector from Power Supply (External Connection - cable supplied) |
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Circuit
Topology |
“L” using a
variable shunt capacitor and a tapped series inductor and variable
capacitor |
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Matching
Network Element Values |
Shunt
Capacitor: 1000 pF; Series Capacitor: 488 pF; Series Inductor: 2.5 uH |
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Output
Impedance |
Wide range.
Will match sputtering source over entire normal pressure range of
operation. |
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Output Cable
Supplied |
36” long
RG-393 cable with Male HN Coaxial Connectors both ends. |
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Ordering
Information |
Call factory or refer to Polaris™ Ordering Information for a complete list of possible packages. |
Copyright © 1993-2008 Materials Science, Inc.
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300 Series Research RF Sputtering Packages
