&
Installation, Operation & Use Manuals
Current Product Offering
Document 251011, Rev. A Polaris™ GEN II Sputtering
Sources for Research, Development & Prototype Production
Registered Owners Click Here to Request
Document
Document 251091, Rev. A SunSource GEN II Linear Planar Magnetron Sputtering
Sources
Registered Owners Click Here to Request
Document
SunSource™ Round Sputtering Sources
Document
251070, Rev. D SunSource™ Round Sputtering Sources (576 KB )
Instruction Manuals for Legacy Products
Polaris™ Research Sputtering Sources
Document 251010, Rev. B Polaris™ 2" Research
Sputtering Sources (394 KB)
SunSource™ Linear Sputtering Sources
Document 251090,
Rev. A SunSource™ Linear, Type "A" Sputtering Sources (525 KB)
