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Installation, Operation & Use Manuals
Current Product Offering Document 251011, Rev. A Polaris™ GEN II Sputtering Sources for Research, Development & Prototype Production  Registered Owners Click Here to Request Document
Document 251091, Rev. A SunSource GEN II Linear Planar Magnetron Sputtering Sources
Registered Owners Click Here to Request Document
SunSource™ Round Sputtering Sources
 Document 251070, Rev. E SunSource™ Round Sputtering Sources (553 KB )
Instruction Manuals for Legacy Products Polaris™ Research Sputtering Sources Document 251010, Rev. B Polaris™ 2" Research Sputtering Sources (394 KB) SunSource™ Linear Sputtering Sources Document 251090, Rev. B SunSource™ Linear, Type "A" Sputtering Sources (525 KB) | 
