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Target Fabrication, Backing Plate & Target Bonding Requirements
Note: Drawing date controls when design was implemented/sold/delivered. See Assembly Drawing on Documentation CD supplied with sputtering source
to determine what drawings should be used. Universal Target and Target Bonding Requirements - Round
 Specification 10000000E Round Target, Backing Plate and Bonding Requirements Note: The following drawings are redundant to the drawings provided for specific sizes. Use these drawings if a hyperlink to the specific configuration desired is not available:
Drawing 00000273A.pdf Round Target Bonding Requirements
Drawing 00000274.pdf Round Target Fabrication Requirements
Specific Size Target Fabrication Drawings - Round
Drawing 00000073A.pdf 2" Target
Specific Size Backing Plate Drawings - Round
Drawing 00000772.pdf 2" Backing Plate Drawing 00001095.pdf 3" Backing Plate - for sources with English (inch) fasteners Drawing 00002091pdf 3" Backing Plate - for sources with metric fasteners Drawing 00001000.pdf 4" Backing Plate Drawing 00000023B.pdf 6" Backing Plate Drawing 00000118.pdf 8" Backing Plate
Specific Size Bonded Target Assembly Requirements - Round
Drawing 00000774.pdf 2" Round Bonded Target Assembly Drawing 00000716.pdf, Rev, A 3" Round Bonded Target Assembly Drawing 00002092.pdf 3" Round Bonded Target Assembly for sources with metric fasteners Drawing 00001008.pdf 4" Round Bonded Target Assembly Drawing 00000175.pdf 8" Round Bonded Target Assembly
Universal Target, Backing Plate and Target Bonding Requirements - Rectangular
Specification 10000100, Rev. C.pdf
Drawing 00000714, Rev. A.pdf Target Bonding Requirements, Rectangular
Drawing 00000715, Rev. B.pdf Fabrication Requirements, Rectangular Targets
LEGACY DRAWINGS
(Generally for sources sold & delivered prior to January, 2007) Targets Drawing 00000054.pdf 2" Backing Plate Drawing 00000313.pdf 4" Target
Drawing 00000283.pdf 4" Direct Water Cooled Target Backing Plates Drawing 00000711.pdf 3" Backing Plate Drawing 00000254.pdf 4" Backing Plate Specific Size Bonded Target Assemblies Drawing 00000068.pdf 2" Round Bonded Target Assembly Drawing 00000307.pdf 4" Round Bonded Target AssemblyBacking Plate | 
