&
Target
Fabrication, Backing Plate & Target Bonding Requirements
Click "Viewer Downloads" above to download Adobe Acrobat
Reader required to open, read and print the specifications on this page.
Note: Drawing date controls when design was implemented/sold/delivered. See
Assembly Drawing on Documentation CD supplied with sputtering source to
determine what drawings should be used.
Universal Target and Target Bonding Requirements - Round
Specification 10000000C Round Target, Backing
Plate and Bonding Requirements
Note: The following drawings are redundant to the drawings provided for
specific sizes. Use these drawings if a hyperlink to the specific
configuration desired is not available:
Drawing
00000273A.pdf Round Target Bonding Requirements
Drawing
00000274.pdf Round Target Fabrication Requirements
Specific Size Target Fabrication Drawings - Round
Drawing
00000073A.pdf 2" Target
Drawing
00000066.pdf 2" Direct Water Cooled Target
Drawing
00000709.pdf 3" Target
Drawing
00000708.pdf 3" Direct Water Cooled Target
Drawing
00000313.pdf 4" Target
Drawing
00000611.pdf 6" Target
Drawing
00000120.pdf 6" Direct Water Cooled Target
Drawing
00000319.pdf 8" Target
Drawing
00000321.pdf 8" Direct Water Cooled Target
Specific Size Backing Plate Drawings - Round
Drawing
00000772.pdf 2" Backing Plate
Drawing
00000711.pdf 3" Backing Plate
Drawing
00001000.pdf 4" Backing Plate
Drawing
00000023A.pdf 6" Backing Plate
Drawing
00000118.pdf 8" Backing Plate
Specific Size Bonded Target Assembly Requirements - Round
Drawing
00000774.pdf 2" Round Bonded Target Assembly
Drawing
00000716.pdf 3" Round Bonded Target Assembly
Drawing
00001008.pdf 4" Round Bonded Target Assembly
Drawing
00000175.pdf 8" Round Bonded Target Assembly
Universal Target, Backing Plate and Target Bonding Requirements -
Rectangular
Specification 10000100, Rev. B.pdf
(190
KB)
Drawing
00000714, Rev. A.pdf Target Bonding Requirements, Rectangular
Drawing
00000715, Rev. B.pdf Fabrication Requirements, Rectangular Targets
LEGACY DRAWINGS
(Generally for sources sold & delivered prior to January, 2007)
Targets
Drawing
00000054.pdf 2" Backing Plate
Drawing
00000313.pdf 4" Target
Drawing
00000283.pdf 4" Direct Water Cooled Target
Backing Plates
Drawing
00000254.pdf 4" Backing Plate
Specific Size Bonded Target Assemblies
Drawing
00000068.pdf 2" Round Bonded Target Assembly
Drawing
00000307.pdf 4" Round Bonded Target AssemblyBacking Plate
