The Highest Performance Sputtering
Sources Just Got Better!
The
unique Kamlok™
Fast Target Exchange System (US
Patent Pending) completely eliminates
the use of target clamp fasteners. Re-deposited target material doesn’t
have to be chipped away from the target clamp to gain access to fasteners
for removal. Seized fasteners
are a thing of the past. No
more drilling and re-tapping of damaged threaded holes caused by fastener
galling. Sealing the target
against the cathode body is now accomplished through the use of a cam
action mechanism.
Not
wanting to substitute one galling problem for another, we’ve implemented
a proprietary, long lasting, UHV compatible coating on the cam screws.
Visual
marks indicating open-closed condition of the Kamlok™
mechanism and a positive stop in both positions assure ease of target
exchange.
Target
clamps are sized to the overall target thickness and target mounting
method. It may be necessary to have several sets of target clamps if
several significant variations of target thickness and/or target mounting
methods are required.
The mechanism components are all completely vacuum
relieved. There are no trapped volumes to create virtual leaks,
contaminate films and create arcing.
