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Application Notes:
  Grounding of High Power DC Sputtering Power
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Drawings & Specifications - Sputtering Sources:
  Installation Control Drawings - Round Flange
    Mount Magnetron Sputtering Sources
  Installation Control Drawings - Round Internal
    Mount Magnetron Sputtering Sources
  Installation Control Drawings - Linear/Rectangular
    Flange Mount Magnetron Sputtering Sources
  Installation Control Drawings - Linear/Rectangular
    Internal Mount Magnetron Sputtering Sources

  Target Fabrication & Bonding Specifications: 
     Round Sputter Sources
     Rectangular Sputter Sources
   Target Fabrication Drawings - Round Sputter
     Sources

Drawings - Power Supplies and Accessories

Frequently Asked Questions
  Magnetron Sputtering Sources

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  Ion 1500 DC Power Supplies
  RF Power Supplies & Matching Networks

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  RF/DC Power Supply Switches

  Magnetron Sputtering Sources:
  Polaris Research Sputtering Sources
  Polaris DC Sputterng Packages
  Polaris RF Sputtering Packages
  SunSource Linear Sputtering Sources

  SunSource Round Sputtering Sources

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 Magnetron Sputtering Sources

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    Drawings:
      Installation
      Target Fabrication
      Target Fabrication & Bonding Specifications
    Modeling Software  
    Ordering Information
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  Polaris Sputtering Packages
    DC Sputtering Packages
    RF Sputtering Packages
    Ordering Information
  
  SunSource Sputtering Sources
    Drawings:
      Installation - Round Flange Mount
      Installation - Round Internal Mount
      Installation - Linear/Rectangular Flange Mount
      Installation - Linear/Rectangular Internal Mount
      Target & Backing Plate Fabrication & Bonding
       Specifications - Round
      Target & Backing Plate Fabrication & Bonding
       Specifications - Rectangular
    Frequently Asked Questions
   Modeling Software
   Ordering Information - Round
   Ordering Informaton - Linear/Rectangular
   Sales Brochures
   Spare Parts
   Technical References

 

Power Supplies and Components

Ion DC Magnetron Power Supplies
  Sales Literature
 
Ion 1500 DC Power Supplies

  Ordering Information
  Ion 1500 DC Power Supplies

 
  Power Supply Accessories
  DC Pass/RF Blocking Filters
  RF/DC Power Supply Switches

  Drawings - Power Supplies and Accessories
 

RF Power Supplies and Matching Networks
  Sales Literature
  RF Power Supplies & Matching Networks


  Power Supply Accessories
  RF/DC Power Supply Switches

  Drawings - Power Supplies and Accessories

  Ordering Information
  RF Power Supplies, Matching Networks & Accessories

 

 

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Last modified: 02 January 2014