Contact Us
Corporate Profile
Drawings & Manuals
How Sputtering Works
Kamlok System
News & Useful Links
Ordering Information
Sputtering Rates
Source Performance
SunSource Modeler
Technical References
Site Map



                           High Target Utilization - High Performance Magnetron Sputtering Sources,
                                                            Power Supplies and Accessories

            We Provide Engineered Solutions - Exactly the Right Source for Your Process and System Needs Since 1992


High Utilization
Narrow Width Sources

  Ion DC Magnetron Sputtering Power Supplies
with Advanced Arc Suppression



Performance Characteristics

Eroded_Targets_03_SunSource Logo.jpg (87455 bytes)

SunSource Round Sources


Kamlok Fast Target
Exchange System

RF Power Supplies and
Sputtering Packages


Linear/Rectangular Sources

  Polaris™ 2" & 3" Research Sources
        Polaris Generic_Logo.jpg (111505 bytes)




Home Site Map

Copyright © 1993-2018 Materials Science, Inc.
Last modified: 18 February 2018