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                           High Target Utilization - High Performance Magnetron Sputtering Sources,
                                                            Power Supplies and Accessories

            We Provide Engineered Solutions - Exactly the Right Source for Your Process and System Needs Since 1992

 

High Utilization
Narrow Width Sources

  Ion™ DC Magnetron Sputtering Power Supplies
with Advanced Arc Suppression

        

 

Performance Characteristics

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SunSource™ Round Sources

 

Kamlok™ Fast Target
Exchange System

RF Power Supplies and
Sputtering Packages

 

Linear/Rectangular Sources

  Polaris™ 2" & 3" Research Sources
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Last modified: 18 February 2018