High Target Utilization - High Performance Magnetron Sputtering Sources,
Power Supplies and Accessories
We Provide Engineered Solutions - Exactly the Right Source for Your Process and System Needs Since 1992
High Utilization
Narrow Width Sources
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Ion™ DC Magnetron Sputtering Power
Supplies
with Advanced Arc Suppression
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Performance Characteristics
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SunSource™
Round Sources
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Kamlok™
Fast Target Exchange System
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RF Power Supplies and
Sputtering Packages
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Linear/Rectangular Sources
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Polaris™ 2" & 3" Research Sources
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