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Round Sputtering Sources, Spare Parts & Accessories

 

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SCOPE OF DELIVERY - INTERNAL MOUNT

  • One target backing plate (thickness must be specified when ordering)
  • One target clamping ring (type and target thickness must be specified when ordering
  • Adjustable height ground shield to accommodate different combined target/backing plate thicknesses
  • Two each 60” long polypropylene water lines
  • One each 36” long argon gas line and union
  • 304 CRES KF-50 bulkhead clamp assembly
  • 304 CRES KF-50 centering ring assembly with viton o-ring
  • Documentation set on CD including: instruction manual, interface control drawing, assembly drawing, target, backing plate and target bonding specifications and drawings, magnet module field profiles
  • Spare Parts Kit, including o-rings, fasteners, washers, screw insulators and end caps, water fitting compression sleeves.

SCOPE OF DELIVERY - FLANGE MOUNT

  • As above, with the addition of protective electrical cap to prevent accidental exposure to high 
    voltage. The KF-50 bulkhead clamp used to retain the cap is Al 6061 instead of 304 CRES.

SPARE PARTS & CONSUMABLES

The parts noted here are for the current version of the source.  Legacy parts are available by contacting the factory.

SIZEPART NUMBERDESCRIPTIONSALES BROCHURE
    Sputtering Sources 
4"00001026  4” Internal Mount Cathode with KF-50 FlangeMC 300 05/98
4"00000768  4” Flange Mount Cathode - ISO 160 FlangeMC 300 05/98
6"00000158  6” Internal Mount Cathode with KF-50 FlangeMC 300 05/98
6"00001000  6” Flange Mount Cathode - ISO 200FlangeMC 300 05/98
8"00000416  8” Internal Mount Cathode with KF-50 FlangeMC 300 05/98
8"00000600  8” Flange Mount Cathode - ISO 250 Flange 
    Feedthrough Kits 
4"-8"00000270  X-Y-Z Feedthrough AssemblyMC 300 05/98
    Vacuum Hardware 
 00000322  304 CRES KF-50 Bulkhead Clamp Assembly with Vented Screws
  (does not include centering ring)
 
 00000100-4  304 CRES KF-50 Centering Ring with Viton O-Ring 
    Target Backing Plates 
4"00001000-1  0.125" thick copper backing plate - GEN II Only - Prior Versions have
  different bolt pattern.  Call factory for old P/N's.
 
4"00001000-2  0.188" thick copper backing plate - GEN II Only- Prior Versions have
  different bolt pattern.  Call factory for old P/N's.
 
4"00001000-3  0.250" thick copper backing plate - GEN II Only- Prior Versions have
  different bolt pattern.  Call factory for old P/N's.
 
6"00000023-1  0.125" thick copper backing plate 
6"00000023-2  0.188" thick copper backing plate 
6"00000023-3  0.250" thick copper backing plate 
8"00000118-1  0.125" thick copper backing plate 
8"00000118-2  0.188" thick copper backing plate 
8"00000118-3  0.250" thick copper backing plate 
    Target Clamping Rings 
4"00000337-1  0.125" thick bonded targets - GEN II Only- Prior Versions have different
  bolt pattern.  Call factory for old P/N's.
 
4"00000337-2  0.188" thick bonded targets - GEN II Only- Prior Versions have different
  bolt pattern.  Call factory for old P/N's.
 
4"00000328-1  0.250" thick bonded targets - GEN II Only- Prior Versions have different
  bolt pattern.  Call factory for old P/N's.
 
4"00000338-1  0.125" thick clamped targets - GEN II Only- Prior Versions have different
  bolt pattern.  Call factory for old P/N's.
 
4"00000338-2  0.188" thick clamped targets - GEN II Only- Prior Versions have different
  bolt pattern.  Call factory for old P/N's.
 
4"00000299  0.250" thick clamped targets - GEN II Only- Prior Versions have different
  bolt pattern.  Call factory for old P/N's.
 
4"00001022  0.375" thick directly water cooled targets - GEN II Only - Prior Versions
  have different bolt pattern.  Call factory for old P/N's.
 
4"000001023  0.250" thick directly water cooled targets - GEN II Only- Prior Versions
  have different bolt pattern.  Call factory for old P/N's.
 
6"00000019-1  0.250" thick bonded targets 
6"00000019-2  0.375" thick bonded targets 
6"00000021-1  0.250" thick clamped targets 
6"00000021-2  0.500" thick clamped targets 
6"00000021-3  0.625" thick clamped targets 
6"00000159-1  0.375" thick directly water cooled targets 
6"00000159-2  0.500" thick directly water cooled targets 
6"00000159-3  0.625" thick directly water cooled targets 
8"00000119-1  0.250" thick bonded targets 
8"00000119-2  0.375" thick bonded targets 
8"00000119-3  0.500" thick bonded targets 
8"00000152-4  0.250" thick clamped targets 
8"00000152-1  0.375" thick clamped targets 
8"00000152-2  0.500" thick clamped targets 
8"00000152-3  0.625" thick clamped targets 
8"00000121-4  0.250" thick directly water cooled targets 
8"00000121-1  0.375 thick directly water cooled targets 
8"00000121-2  0.500" thick directly water cooled targets 
8"00000121-3  0.625" thick directly water cooled targets 
    Insulators 
4"00000872  Insulator Washer - Ultem 
4"00000869  Insulator Seal - Ultem 
6"-8"00000025  Body Insulator - Ultem (old style was Teflon) 
6"-8" 00000028  Bolt Insulator Cap - Teflon 
6"-8" 00000029  Bolt Insulator - Glass Filled Teflon 
    Ground (Anode) Shields 
4"00001031  Side Ground Shield, Internal Mount 
4"00001004  Side Ground Shield, Flange Mount 
4"00001005  Top Ground Shield 
6"00000027-1  Side Ground Shield, Internal Mount 
6"   Side Ground Shield, Flange Mount 
6"00000024-1  Top Ground Shield 
8"00000122-1  Side Ground Shield, Internal Mount 
8"   Side Ground Shield, Flange Mount 
8"00000140-1  Top Ground Shield 
    Magnet Modules 
4"00000695  4 Inch Magnet Module 
6"00002469  6 Inch Magnet Module (Old Part Number 00000169-1) 
8"00000324-1  8 Inch Magnet Module 
    Water Fitting 
4"00000658-3  Push-to-Connect Straight Union, 3/8" O.D Polyethylene Tubing 
6-8"00000168  304 CRES Water Fitting Assembly, 1/2" O.D., 3/8" ID Polyethylene Tubing. 
6-8"00000155  Delrin Compression Sleeve for P/N 00000168 Water Fitting Assembly 
6-8"00000153-016  Viton O-Ring for P/N 00000168 Water Fitting Assembly Face Seal 
6-8"00000064  Brass Hex Nut for P/N 00000168 Water Fitting Assembly 
    Gas Fitting 
6-8"00000703  316 CRES Gas Fitting Assembly with 1/8" O.D. Swagelok Fitting 
6-8"00000153-010  Viton O-Ring for P/N 00000703 Gas Fitting Assembly Face Seal 

 

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Last modified: 26 February 2017