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Round Sputtering Sources, Spare Parts & Accessories

 

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SCOPE OF DELIVERY - INTERNAL MOUNT

  • One target backing plate (thickness must be specified when ordering)
  • One target clamping ring (type and target thickness must be specified when ordering
  • Adjustable height ground shield to accommodate different combined target/backing plate thicknesses
  • Two each 60 long polypropylene water lines
  • One each 36 long argon gas line and union
  • 304 CRES KF-50 bulkhead clamp assembly
  • 304 CRES KF-50 centering ring assembly with viton o-ring
  • Documentation set on CD including: instruction manual, interface control drawing, assembly drawing, target, backing plate and target bonding specifications and drawings, magnet module field profiles
  • Spare Parts Kit, including o-rings, fasteners, washers, screw insulators and end caps, water fitting compression sleeves.

SCOPE OF DELIVERY - FLANGE MOUNT

  • As above, with the addition of protective electrical cap to prevent accidental exposure to high 
    voltage. The KF-50 bulkhead clamp used to retain the cap is Al 6061 instead of 304 CRES.

SPARE PARTS & CONSUMABLES

The parts noted here are for the current version of the source.  Legacy parts are available by contacting the factory.

SIZEPART NUMBERDESCRIPTIONSALES BROCHURE
    Sputtering Sources 
4"00001026  4 Internal Mount Cathode with KF-50 FlangeMC 300 05/98
4"00000768  4 Flange Mount Cathode - ISO 160 FlangeMC 300 05/98
6"00000158  6 Internal Mount Cathode with KF-50 FlangeMC 300 05/98
6"00001000  6 Flange Mount Cathode - ISO 200FlangeMC 300 05/98
8"00000416  8 Internal Mount Cathode with KF-50 FlangeMC 300 05/98
8"00000600  8 Flange Mount Cathode - ISO 250 Flange 
    Feedthrough Kits 
4"-8"00000270  X-Y-Z Feedthrough AssemblyMC 300 05/98
    Vacuum Hardware 
 00000322  304 CRES KF-50 Bulkhead Clamp Assembly with Vented Screws
  (does not include centering ring)
 
 00000100-4  304 CRES KF-50 Centering Ring with Viton O-Ring 
    Target Backing Plates 
4"00001000-1  0.125" thick copper backing plate - GEN II Only - Prior Versions have
  different bolt pattern.  Call factory for old P/N's.
 
4"00001000-2  0.188" thick copper backing plate - GEN II Only- Prior Versions have
  different bolt pattern.  Call factory for old P/N's.
 
4"00001000-3  0.250" thick copper backing plate - GEN II Only- Prior Versions have
  different bolt pattern.  Call factory for old P/N's.
 
6"00000023-1  0.125" thick copper backing plate 
6"00000023-2  0.188" thick copper backing plate 
6"00000023-3  0.250" thick copper backing plate 
8"00000118-1  0.125" thick copper backing plate 
8"00000118-2  0.188" thick copper backing plate 
8"00000118-3  0.250" thick copper backing plate 
    Target Clamping Rings 
4"00000337-1  0.125" thick bonded targets - GEN II Only- Prior Versions have different
  bolt pattern.  Call factory for old P/N's.
 
4"00000337-2  0.188" thick bonded targets - GEN II Only- Prior Versions have different
  bolt pattern.  Call factory for old P/N's.
 
4"00000328-1  0.250" thick bonded targets - GEN II Only- Prior Versions have different
  bolt pattern.  Call factory for old P/N's.
 
4"00000338-1  0.125" thick clamped targets - GEN II Only- Prior Versions have different
  bolt pattern.  Call factory for old P/N's.
 
4"00000338-2  0.188" thick clamped targets - GEN II Only- Prior Versions have different
  bolt pattern.  Call factory for old P/N's.
 
4"00000299  0.250" thick clamped targets - GEN II Only- Prior Versions have different
  bolt pattern.  Call factory for old P/N's.
 
4"00001022  0.375" thick directly water cooled targets - GEN II Only - Prior Versions
  have different bolt pattern.  Call factory for old P/N's.
 
4"000001023  0.250" thick directly water cooled targets - GEN II Only- Prior Versions
  have different bolt pattern.  Call factory for old P/N's.
 
6"00000019-1  0.250" thick bonded targets 
6"00000019-2  0.375" thick bonded targets 
6"00000021-1  0.250" thick clamped targets 
6"00000021-2  0.500" thick clamped targets 
6"00000021-3  0.625" thick clamped targets 
6"00000159-1  0.375" thick directly water cooled targets 
6"00000159-2  0.500" thick directly water cooled targets 
6"00000159-3  0.625" thick directly water cooled targets 
8"00000119-1  0.250" thick bonded targets 
8"00000119-2  0.375" thick bonded targets 
8"00000119-3  0.500" thick bonded targets 
8"00000152-4  0.250" thick clamped targets 
8"00000152-1  0.375" thick clamped targets 
8"00000152-2  0.500" thick clamped targets 
8"00000152-3  0.625" thick clamped targets 
8"00000121-4  0.250" thick directly water cooled targets 
8"00000121-1  0.375 thick directly water cooled targets 
8"00000121-2  0.500" thick directly water cooled targets 
8"00000121-3  0.625" thick directly water cooled targets 
    Insulators 
4"00000872  Insulator Washer - Ultem 
4"00000869  Insulator Seal - Ultem 
6"-8"00000025  Body Insulator - Ultem (old style was Teflon) 
6"-8" 00000028  Bolt Insulator Cap - Teflon 
6"-8" 00000029  Bolt Insulator - Glass Filled Teflon 
    Ground (Anode) Shields 
4"00001031  Side Ground Shield, Internal Mount 
4"00001004  Side Ground Shield, Flange Mount 
4"00001005  Top Ground Shield 
6"00000027-1  Side Ground Shield, Internal Mount 
6"   Side Ground Shield, Flange Mount 
6"00000024-1  Top Ground Shield 
8"00000122-1  Side Ground Shield, Internal Mount 
8"   Side Ground Shield, Flange Mount 
8"00000140-1  Top Ground Shield 
    Magnet Modules 
4"00000695  4 Inch Magnet Module 
6"00002469  6 Inch Magnet Module (Old Part Number 00000169-1) 
8"00000324-1  8 Inch Magnet Module 
    Water Fitting 
4"00000658-3  Push-to-Connect Straight Union, 3/8" O.D Polyethylene Tubing 
6-8"00000168  304 CRES Water Fitting Assembly, 1/2" O.D., 3/8" ID Polyethylene Tubing. 
6-8"00000155  Delrin Compression Sleeve for P/N 00000168 Water Fitting Assembly 
6-8"00000153-016  Viton O-Ring for P/N 00000168 Water Fitting Assembly Face Seal 
6-8"00000064  Brass Hex Nut for P/N 00000168 Water Fitting Assembly 
    Gas Fitting 
6-8"00000703  316 CRES Gas Fitting Assembly with 1/8" O.D. Swagelok Fitting 
6-8"00000153-010  Viton O-Ring for P/N 00000703 Gas Fitting Assembly Face Seal 

 

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Last modified: 26 February 2017