 | One target backing plate (thickness must be specified when ordering) |
| One target clamping ring (type and target thickness must be specified when
ordering |
| Adjustable height ground shield to accommodate different combined target/backing plate thicknesses |
| Two each 60” long polypropylene water lines |
| One each 36” long argon gas line and union |
| 304 CRES KF-50 bulkhead clamp assembly |
| 304 CRES KF-50 centering ring assembly with viton o-ring |
| Documentation
set on CD including: instruction manual, interface control drawing, assembly
drawing, target, backing plate and target bonding specifications and
drawings, magnet module field profiles |
| Spare Parts Kit, including o-rings, fasteners, washers, screw insulators and end caps, water fitting compression sleeves.
|
| SIZE |
PART NUMBER |
DESCRIPTION |
SALES
BROCHURE |
| |
|
Sputtering Sources |
|
| 4" |
00000250 |
4” Internal Mount Cathode with KF-50 Flange |
MC 300 05/98 |
| 4" |
00000500 |
4” Flange Mount Cathode - ISO 160 Flange |
MC 300 05/98 |
| 6" |
00000158 |
6” Internal Mount Cathode with KF-50 Flange |
MC 300 05/98 |
| 6" |
00001000 |
6” Flange Mount Cathode - ISO 200Flange |
MC 300 05/98 |
| 8" |
00000416 |
8”
Internal Mount Cathode with KF-50 Flange |
MC 300 05/98 |
| 8" |
00000600 |
8”
Flange Mount Cathode - ISO 250 Flange |
|
| |
|
Feedthrough Kits |
|
| 4"-8" |
00000270 |
X-Y-Z
Feedthrough Assembly |
MC 300 05/98 |
| |
|
Vacuum Hardware |
|
| |
00000322 |
304 CRES KF-50 Bulkhead Clamp Assembly with Vented Screws
(does not include centering ring) |
|
| |
00000100-4 |
304 CRES Centering Ring with Viton O-Ring |
|
| |
|
Target
Backing Plates |
|
| 4" |
00000254-1 |
0.125" thick copper backing plate |
|
| 4" |
00000254-2 |
0.188" thick copper backing plate |
|
| 4" |
00000254-3 |
0.250" thick copper backing plate |
|
| 6" |
00000023-1 |
0.125" thick copper backing plate |
|
| 6" |
00000023-2 |
0.188" thick copper backing plate |
|
| 6" |
00000023-3 |
0.250" thick copper backing plate |
|
| 8" |
00000118-1 |
0.125" thick copper backing plate |
|
| 8" |
00000118-2 |
0.188" thick copper backing plate |
|
| 8" |
00000118-3 |
0.250" thick copper backing plate |
|
| |
|
Target
Clamping Rings |
|
| 4" |
00000312 |
0.125" thick bonded targets |
|
| 4" |
00000253-1 |
0.188" thick bonded targets |
|
| 4" |
00000253-2 |
0.250" thick bonded targets |
|
| 4" |
00000309 |
0.125" thick clamped targets |
|
| 4" |
00000315-1 |
0.188" thick clamped targets |
|
| 4" |
00000315-2 |
0.250" thick clamped targets |
|
| 4" |
00000315-3 |
0.375" thick clamped targets |
|
| 4" |
00000282-1 |
0.375" thick directly water cooled targets |
|
| 4" |
00000282-2 |
0.500" thick directly water cooled targets |
|
| 6" |
00000019-1 |
0.250" thick bonded targets |
|
| 6" |
00000019-2 |
0.375" thick bonded targets |
|
| 6" |
00000021-1 |
0.250" thick clamped targets |
|
| 6" |
00000021-2 |
0.500" thick clamped targets |
|
| 6" |
00000021-3 |
0.625" thick clamped targets |
|
| 6" |
00000159-1 |
0.375" thick directly water cooled targets |
|
| 6" |
00000159-2 |
0.500" thick directly water cooled targets |
|
| 6" |
00000159-3 |
0.625" thick directly water cooled targets |
|
| 8" |
00000119-1 |
0.250" thick bonded targets |
|
| 8" |
00000119-2 |
0.375" thick bonded targets |
|
| 8" |
00000119-3 |
0.500" thick bonded targets |
|
| 8" |
00000152-4 |
0.250" thick clamped targets |
|
| 8" |
00000152-1 |
0.375" thick clamped targets |
|
| 8" |
00000152-2 |
0.500" thick clamped targets |
|
| 8" |
00000152-3 |
0.625" thick clamped targets |
|
| 8" |
00000121-4 |
0.250" thick directly water cooled targets |
|
| 8" |
00000121-1 |
0.375
thick directly water cooled targets |
|
| 8" |
00000121-2 |
0.500" thick directly water cooled targets |
|
| 8" |
00000121-3 |
0.625" thick directly water cooled targets |
|
| |
|
Insulators |
|
| 4" |
00000008 |
Bolt
Insulator Cap |
|
| 4" |
00000271 |
Bolt
Insulator |
|
| 4"-8" |
00000025 |
Body
Insulator |
|
| 4"-8" |
00000028 |
Bolt
Insulator |
|
| 4"-8" |
00000029 |
Bolt
Insulator Cap |
|
| |
|
Ground (Anode) Shields |
|
| 4" |
00000256-1 |
Side Ground Shield, Internal Mount |
|
| 4" |
00000503 |
Side Ground Shield, Flange Mount |
|
| 4" |
00000252-1 |
Top Ground Shield |
|
| 6" |
00000027-1 |
Side Ground Shield, Internal Mount |
|
| 6" |
|
Side Ground Shield, Flange Mount |
|
| 6" |
00000024-1 |
Top Ground Shield |
|
| 8" |
00000122-1 |
Side Ground Shield, Internal Mount |
|
| 8" |
|
Side Ground Shield, Flange Mount |
|
| 8" |
00000140-1 |
Top Ground Shield |
|
| |
|
Magnet Modules |
|
| 4" |
00000306-1 |
4 Inch Magnet Module |
|
| 6" |
00000169-1 |
6 Inch Magnet Module |
|
| 8" |
00000324-1 |
8 Inch Magnet Module |
|
| |
|
Water Fitting |
|
| |
00000168 |
304 CRES Water Fitting Assembly, 1/2" O.D., 3/8" ID Plastic
Tubing. |
|
| |
00000155 |
Delrin Compression Sleeve for P/N 00000168 Water Fitting Assembly |
|
| |
00000153-016 |
Viton O-Ring for P/N 00000168 Water Fitting Assembly Face Seal |
|
| |
00000064 |
Brass Hex Nut for P/N 00000168 Water Fitting Assembly |
|
| |
|
Gas Fitting |
|
| |
00000703 |
316 CRES Gas Fitting Assembly with 1/8" O.D. Swagelok Fitting |
|
| |
00000153-010 |
Viton O-Ring for P/N 00000703 Gas Fitting Assembly Face Seal |
|
Round Sputtering Sources, Spare Parts & Accessories
