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RF Power Generators and Impedance Matching Networks


 

Complete Power Generation Systems

 

 

Complete RF Power Generation System
with Automatic Impedance Matching Network,
Matching Network Controller-Power Supply and
all Necessary Interconnect Cables

 

 

 

 

bullet 300 watt and 600 watt 13.56 MHz Packages - Economically Priced
bullet Automatic and Manual Impedance Matching Networks Available
bullet 19" 1/2 Rack Mount Power Generator, Separate Matching Network
bullet Complete - All Necessary Interconnect Cables Provided
bullet Easy to Read Digital Displays - User Friendly Controls
bullet RS-232 and Analog Communication Capability
bullet Air Cooled
bullet Common Exciter Operation
bullet CE, CSA and UL Compliant

 

Description

A 13.56 MHz power generator packaged in a 19" 1/2 rack configuration and a separate impedance matching network are provided.  This allows the matching network to be located as close to the sputtering source or plasma load as possible.  This is highly desirable and minimizes many problems like high reflected power, power cable overheating and burn-throughs and other unsafe conditions.  Short cables are good.  The impedance matching network provides the user with a broad tuning range.  The impedance matching network is configured to enable it to match a wide range of impedances.  The RF generator allows precise control from the front panel or via a rear panel analog or optional RS-232 interface.  Power and tuning (capacitor) adjustment are accomplished either through knobs on the manual tuning network (forward and reflected power are read on the power generator front panel) or adjusted and read on the automatic matching network controller front panel or on the users sytem controls through the analog or optional RS-232 interface.

A set-point potentiometer allows the operator to set and vary Forward/Incident RF Power.  Digital meters display Forward and Reflected/Reflectant Power developed on the source.  The external control interface on the back of the unit allows the power generator to be controlled by the user's programmable controller or computer.  LED indicators provide visual indications of the status of safety and functional interlocks.  The power generation system incorporates high efficiency switch mode power supplies and solid-state technology.  They are very robust and can accept 30% reflected power before they operate in fold-back mode.

 

Power Generators

300 Watts

  Sales Brochure PS 610 07/11

 

Power Supply  

 

AC Mains Input

110-240 VAC,  Single Phase, 50/60 Hz, 5.5A  (550 watts) maximum

AC Mains Input ConnectorIEC-320C-C14 EMI filtered

RF Output Power

0-300 watts into a 50 ohm load

Output Frequency

13.56 MHz .005%

Output Impedance

50 W resistive

Reflected Power Limit30 watts maximum

Output Connector

Female N to Matching Network (8 foot long RG-213 cable supplied when complete power generation system is purchased)

Output Power Stability

.5% of set point

Remote Analog Control Signal 0-5 VDC
Analog Interface Connector 15 pin female D type EMI/RFI filtered
RS-232 Serial Control Connector (Optional) 9 pin D type
Common Exciter (Optional) Allows multiple generators to be run simultaneously
Common Exciter Input/Output Connector BNC

Cooling

Forced air via a 145 cfm fan

Operating Environment

Maximum 90% relative humidity.  15-40 C (59-104 F) ambient temperature

Size Rack Mount Power Supply

9.5" wide (with supplied rack mounting ears) x 5.5 high 1/2 Rack Mount Panel x 16 Deep (14.0 cm x 19.1 cm x 39.4 cm)

Weight

Nominal 14 pounds (6.4 kg)

 

600 Watts

  Sales Brochure PS 620 01/12

 

Power Supply  

 

AC Mains Input

110-240 VAC,  Single Phase, 50/60 Hz, 5.5A  (550 watts) maximum

AC Mains Input ConnectorIEC-320C-C14 EMI filtered

RF Output Power

0-600 watts into a 50 ohm load

Output Frequency

13.56 MHz .005%

Output Impedance

50 W resistive

Reflected Power Limit 30 watts maximum

Output Connector

Female N to Matching Network (8 foot long RG-213 cable supplied when complete power generation system is purchased)

Output Power Stability

.5% of set point

Remote Analog Control Signal 0-5 VDC
Analog Interface Connector 15 pin female D type EMI/RFI filtered
RS-232 Serial Control Connector (Optional) 9 pin D type
Common Exciter (Optional) Allows multiple generators to be run simultaneously
Common Exciter Input/Output Connector BNC

Cooling

Forced air via a 145 cfm fan

Operating Environment

Maximum 90% relative humidity.  15-40 C (59-104 F) ambient temperature

Size Rack Mount Power Supply

8" wide (9.5" wide with supplied rack mounting ears) x 7.0 high 1/2 Rack Mount Panel x 19 Deep (20.3 cm x 17.8 cm x 48.8 cm)

Weight

Nominal 22 pounds (10 kg)

 

Impedance Matching Networks

500 Watts

  Sales Brochure MN 210 07/11

 

Automatic Impedance
Matching Network

 

 

 

Power Rating500 watts

RF Output Connector

Female HN Coaxial Cable Connector Standard (N type or stud optional)

RF Input Connector

Female N Connector from Power Supply (8' long RG-213 cable supplied)

Network Controller Connector15 pin female D type EMI/RFI filtered

Circuit Topology

L network configuration using an air variable load capacitor and vacuum capacitor

Output Impedance

Wide range.  Will match sputtering source over entire normal pressure range of operation.

Output Cable (sold separately)

36 long RG-393 cable with Male HN Coaxial Connectors both ends recommended. Cables longer than 72" should not be used to minimize reflected power and cable heating.

DC Bias Circuit (Optional) Measures developed DC voltage
Size8.75" wide x 5.00" high x 15.00" deep (22.23 cm x 12.7 cm x 38.1 cm)
WeightNominal 10 pounds (4.5 kg)
  
Automatic Impedance Matching Network Controller-Power Supply

AC Mains Input

100-240 VAC,  Single Phase, 50/60 Hz, 2A maximum

AC Mains Input ConnectorIEC-320C-14 EMI filtered
Size9.50" wide (with supplied rack mounting ears) x 1.75" high x 9.75" deep (4.45 cm x 21.59 cm x 24.77 cm)
Matching Network Connector15 pin female D type EMI/RFI filtered (10' signal control cable with male connectors on both ends suupplied)
Load and Tune ControlManual or automatic via the front panel or remote control
Remote Analog Control Connector25 pin D type EMI/RFI filtered
Weight Nominal 2 pounds (.91 kg)

 

  Sales Brochure MN 110 07/11

 

Manual Impedance
Matching Network
Power Rating500 watts

RF Output Connector

Female HN Coaxial Cable Connector

RF Input Connector

Female N Connector from Power Supply (8' long RG-213 cable supplied)

Circuit Topology

L network configuration using an air variable load capacitor and vacuum capacitor

Output Impedance

Wide range.  Will match sputtering source over entire normal pressure range of operation.

Output Cable (sold separately)

36 long RG-393 cable with Male HN Coaxial Connectors both ends recommended. Cables longer than 72" should not be used to minimize reflected power and cable heating.

DC Probe (Optional) Allows measurement of developed DC voltage
Size7.50" wide x 5.50" high x 17.50" deep (19.05 cm x 13.97 cm x 44.45 cm)
WeightNominal 5 pounds (2.3 kg)

 

700 Watts - Option 1 (ATN-10)

  Sales Brochure MN 220 01/12

 

Automatic Impedance
Matching Network

 

 

 

Power Rating700 watts

RF Output Connector

Female HN Coaxial Cable Connector Standard (N type or stud optional)

RF Input Connector

Female N Connector from Power Supply (8' long RG-213 cable supplied)

Network Controller Connector15 pin female D type EMI/RFI filtered

Circuit Topology

L network configuration using an air variable load capacitor and vacuum capacitor

Output Impedance

Wide range.  Will match sputtering source over entire normal pressure range of operation.

Output Cable (sold separately)

36 long RG-393 cable with Male HN Coaxial Connectors both ends recommended. Cables longer than 72" should not be used to minimize reflected power and cable heating.

DC Bias Circuit (Optional)Measures developed DC voltage
Size8.75" wide x 5.00" high x 15.00" deep (22.23 cm x 12.7 cm x 38.1 cm)
WeightNominal 10 pounds (4.5 kg)
  
Automatic Impedance Matching Network Controller-Power Supply

AC Mains Input

100-240 VAC,  Single Phase, 50/60 Hz, 2A maximum

AC Mains Input ConnectorIEC-320C-14 EMI filtered
Size9.50" wide (with supplied rack mounting ears) x 1.75" high x 9.75" deep (4.45 cm x 21.59 cm x 24.77 cm)
Matching Network Connector15 pin female D type EMI/RFI filtered (10' signal control cable with male connectors on both ends suupplied)
Load and Tune ControlManual or automatic via the front panel or remote control
Remote Analog Control Connector25 pin D type EMI/RFI filtered
Weight Nominal 2 pounds (.91 kg)

 

700 Watts - Option 2 (ATN-10-A2)
The fans and motors are completely within the enclosure compared to the ATN-10 (above)

  Sales Brochure MN 230 10/16

 

Automatic Impedance
Matching Network

Power Rating700 watts

RF Output Connector

Female HN Coaxial Cable Connector Standard (N type or stud optional)

RF Input Connector

Female N Connector from Power Supply (8' long RG-213 cable supplied)

Network Controller Connector15 pin female D type EMI/RFI filtered

Circuit Topology

L network configuration using an air variable load capacitor and vacuum capacitor

Output Impedance

Wide range.  Will match sputtering source over entire normal pressure range of operation.

Output Cable (sold separately)

36 long RG-393 cable with Male HN Coaxial Connectors both ends recommended. Cables longer than 72" should not be used to minimize reflected power and cable heating.

DC Bias Circuit (Optional)Measures developed DC voltage
Size8.50" wide x 4.875" high x 15.00" deep (21.6 cm x 12.4 cm x 38.1 cm)
WeightNominal 11.5 pounds (5.22 kg)
  
Automatic Impedance Matching Network Controller-Power Supply

AC Mains Input

100-240 VAC,  Single Phase, 50/60 Hz, 2A maximum

AC Mains Input ConnectorIEC-320C-14 EMI filtered
Size9.50" wide (with supplied rack mounting ears) x 1.75" high x 9.75" deep (4.45 cm x 21.59 cm x 24.77 cm)
Matching Network Connector15 pin female D type EMI/RFI filtered (10' signal control cable with male connectors on both ends suupplied)
Load and Tune ControlManual or automatic via the front panel or remote control
Remote Analog Control Connector25 pin D type EMI/RFI filtered
Weight Nominal 2 pounds (.91 kg)

 

 

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Last modified: 13 January 2017