Power Generation Systems & Components Installation Control Drawings

Ion™ DC Magnetron Power Supplies

  Drawing 00002103, Rev. B Ion™ 1500 DC Magnetron Sputtering Power Supply

13.56 MHz RF Power Supplies

  Drawing 00002385 RF-3 300 watt RF Power Generator

Impedance Matching Networks

  Drawing 0000xxxx ATN-5 500 watt Automatic Impedance Matching Network and Controller

  Drawing 00002926 ATN-10-A2 700 watt Automatic Impedance Matching Network

  Drawing 00002386 MN-500 watt Manual Impedance Matching Network

RF/DC Power Supply Switches

Drawing 00002391 RF/DC Power Supply Switch - 1 input, 2 outputs     Drawing 00002383 RF/DC Power Supply Switch - 1 input, 3 outputs     Drawing 00002392 RF/DC Power Supply Switch - 1 input, 4 outputs     Drawing 00002384 RF/DC Power Supply Switch - 2 inputs, 4 outputs

DC Pass/RF Blocking Filters

  Drawing 00002374, Rev. A RF Blocking/DC Pass Filter

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Last modified: 26 February 2017