Power Generation Systems & Components Installation Control Drawings

Ion™ DC Magnetron Power Supplies

  Drawing 00002103, Rev. A Ion™ 1500 DC Magnetron Sputtering Power Supply

13.56 MHz RF Power Supplies

  Drawing 0000xxxx RF-3 300 watt RF Power Generator

Impedance Matching Networks

  Drawing 0000xxxx ATN-5 500 watt Automatic Impedance Matching Network and Controller
 

  Drawing 00002386 MN-500 watt Manual Impedance Matching Network

RF/DC Power Supply Switches

Drawing 00002391 RF/DC Power Supply Switch - 1 input, 2 outputs     Drawing 00002383 RF/DC Power Supply Switch - 1 input, 3 outputs     Drawing 00002392 RF/DC Power Supply Switch - 1 input, 4 outputs     Drawing 00002384 RF/DC Power Supply Switch - 2 inputs, 4 outputs

DC Pass/RF Blocking Filters

  Drawing 00002374 RF Blocking/DC Pass Filter

Copyright © 1993-2012 Materials Science, Inc.
Last modified: 10 May 2012