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Drawings, Specifications & Manuals

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Installation Drawings - Round

Polaris™ Sputtering Sources

Round Internal Mount SunSource™ Sputtering Sources

Round Flange Mount SunSource™ Sputtering Sources

Installation Drawings - Linear/Rectangular

Linear/Rectangular Internal Mount SunSource™ Sputtering Sources

Linear/Rectangular Flange Mount SunSource™ Sputtering Sources

Target, Backing Plate & Bonding Requirements

Link to Target, Backing Plate & Bonding Requirements

Power Supplies, Filters and Switches

DC Magnetron Power Supplies.
13.56 MHz RF Power Supplies and Impedance Matching Networks.
DC Pass/RF BlockingFilters.
RF and DC Power Supply Switches.

Copyright © 1993-2012 Materials Science, Inc.
Last modified: 10 January 2012