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Installation Drawings - Round

Polaris™ Sputtering Sources

Round Internal Mount SunSource™ Sputtering Sources

Round Flange Mount SunSource™ Sputtering Sources

 

 

Installation Drawings - Linear/Rectangular
90x580mm_01_72dpi.jpg (85456 bytes)

 

Linear/Rectangular Internal Mount SunSource™ Sputtering Sources

Linear/Rectangular Flange Mount SunSource™ Sputtering Sources

 

 

Instruction Manuals - Round

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Target, Backing Plate & Bonding Requirements

BondedTargets_Group_Spec.jpg (23671 bytes)Link to Target, Backing Plate & Bonding Requirements

 

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Last modified: April 04, 2008