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Feedthrus & Hardware
Shutter Assemblies

 

 


Useful Stuff - Components


 

Feedthroughs, Insulators & Hardware

Over the years, we have designed and built various components that we could not obtain commercially.  Problems solved include feedthroughs without internal restrictions on the ID, stainless steel KF swing clamps with threads and nuts that don't gall and seize, baseplate feedthroughs with internal clearance for water, power and gas fittings and more.

 

 

Shutter Assemblies

These are the shutter assemblies used on our 2" and 3" Polaris™ sputtering sources.  They can also be used to protect substrate heater stages, ion sources and other components.

 

 

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Last modified: 06 July 2023