 These are the shutter assemblies used on our 2" and 3" Polaris™ sputtering sources. They can also be used to protect substrate heater stages, ion sources and other components. The shutter plate and shaft are thick and robust - they will remain rigid under high temperatures. We can supply custom shutter brackets to facilitate easy installation of the shutter assembly into a users system. A ferrofluidic rotary feedthrough is used to transmit motion through the vacuum chamber wall. The flexible stainless steel shaft eliminates the need for complex rotary motion mechanisms and u-joints within the vacuum system and can be supplied in any length desired. |
