1500 Series Research DC Power Supplies
Ion™ 1500 DC Magnetron Power Supply  Ion™ 1500 Series Research DC Power Supplies Sales Brochure PS 700 12/11 Rev. E
Features - Superior Arc Detection & Suppression - < 100 nsecs (.1 µ secs)
- Adjustable Arc Detection Delay & Off Time Before Restarting
- Voltage, Current & Power Regulation Modes
- Adjustable Power Ramping
- Adjustable Run Timer
- Stored Target Parameters for Up to 7 Separate Targets
- kWHr Counting & Time Limit
- RS-232 & Analog Communication Capability
- Wide 0-1000 Volt Range Compared to 0-800 volts Supplied by Competitors - Full Rated Power can be Applied Under Nearly all Conditions
- Stable operation down to 20 watts for non-reactive processes
- Suitable for use as a substrate bias power supply
- No Transformer Tap Changes Are Necessary to Operate Across Entire Range
- Compact, low profile chassis -Saves rack space
- 2 Year Warranty
- CE Compliant
Arc Damage is Virtually Eliminated When Arc Detection & Suppression is Activated - Watch the Video Click here to download & play flash video of Ion™ 1500 and Polaris Source in Operation -
still images from this video shown below 
Hard arc on Al target in O2 environment on
3" Polaris™ source - no arc suppression 
Same view & conditions as above, but with
plasma re-igniting - arcing is still decaying 
Arc suppression of Ion™ 1500 working in same
environment & conditions - producing a stable
plasma & good target utilization with negligible
arc induced damage. Specifications | Ion™ 1500 Power Supply | 
| | Input Frequency | 50 - 60 Hz | | Input Phase | 1 phase | | Input Voltage | 85 - 275 VAC (lower VAC may limit output) | | Input Current | 12.5 amps maximum | | Power Factor | > 0.98 | | Input Power Consumption | 1.75 kW | | Output Power | 1500 watts | | Output Power @ 1000 volts | 1500 watts | | Output Power @ 500 volts | 1500 watts | | Output Power @ 200 volts | 800 watts | | Output Voltage (steady state) | 1000 volts maximum | | Output Voltage (strike) | 1000 volts maximum | | Output Current (maximum) | 4 A | | Arc Detection Time | < 100 nsecs (.1 µ secs) | | Arc Energy | < 1 mJ | | Arc Detect Delay Time | 0.1 to 6500 µ secs (adjustable) | | Arc Out/Off Time | 0 (no arc handling) or 32 to 65000 µ secs (adjustable) | | Arc Rate Counter | Yes | | Arc Recovery Time | Set points will be re-established < 200 µ secs after arc off time | | Line Regulation | > 99% (includes load and line variations over an arbitrary time interval) - aka < 1% | | Load Regulation | > 99% (includes load and line variations over an arbitrary time interval) - aka < 1% | | Power Ramping | 0.001 to 65 seconds (adjustable) | | Run Timer | 0.1 to 6553 seconds (adjustable) | | kWHr Counting | Yes | | kWHr Limit | 0 (limit shutdown disabled) or 0.01 to 655 kWHr's | | LED Display Accuracy | 1% | | Display Resolution | 0.1 watt, 1 volt, 0.001 amp (1 milliamp) | | Stored Target Information | Stores parameter sets for targets that can be re-installed after exchange. Saves P/V/I, ramp time, run time, arc detect delay, arc off time, kWhr's for 7 separate targets | | Interlocks | 1 each | | Temperature Monitoring/Protection | Yes. “Fan on Demand” cooling with thermal shutdown protection. | | Dimensions | 48.3 cm/19" x 47.6 cm/18.75" x 4.44 cm/1.75" (1 U Rack Height) | | Weight | 8.2 kG/18 pounds | | RS-232/Analog Interfaces | Yes | | DC Bias Operation | Basic open circuit operation between 1000 volts to < 100 volts | | Output Power Connector | SO 239 (Female UHF) | | | | | Ordering Information | Contact Factory or refer to Ion™ 1500 Ordering Information |
Complete Sputtering Packages 
Polaris GEN II 2" & 3" Research Sputtering Sources
used in combination with the Ion™ 1500 allow performance
not possible with any other sputtering source & DC power
supply - for example: - Sputter 1/4" [6,35 mm] thick Ni targets
- Deposit insulating films from metallic targets without the use of expensive power supplies in an essentially arc-damage free environment
- Achieve superior target utilization
- Apply virtually full rated output of power supply to source across broad pressure range
- Deposit very thin films at extremely low power levels
Accessories 
Blocking filters (required when the Ion™ 1500
is used simultaneously with an RF Power Supply) and
switches that allow the sequential use of multiple sputtering
sources from a single power supply are available. DC Pass/RF Blocking Filter Installed on Output of Ion™ 1500 | 
