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Linear/Rectangular Sputtering Sources

SCOPE OF DELIVERY - INTERNAL MOUNT

bulletOne target backing plate (thickness must be specified when ordering)
bulletOne set of target clamps (type and target thickness must be specified when ordering)
bulletGround shield/Anode
bulletTwo each 60” long polypropylene water lines
bulletOne each 36” long argon gas line and union
bullet304 CRES KF-50 bulkhead clamp assembly (only for units supplied with KF-50 flange)
bullet304 CRES KF-50 centering ring assembly with viton o-ring (only for units supplied with KF-50 flange)
bulletSpecification 10000100 “Rectangular Target, Backing Plate and Target Bonding Requirements”
bulletInstruction Manual
bulletDocumentation set on CD including: instruction manual, interface control drawing, assembly drawing, target, backing plate and target bonding specifications and drawings, magnet module field profiles
bulletSpare Parts Kit, including o-rings, fasteners, washers, screw insulators and end caps, water fitting compression sleeves.

SCOPE OF DELIVERY - FLANGE MOUNT

bullet As above, with the addition of protective electrical cap to prevent accidental exposure to high 
 voltage.

SUNSOURCE™ MAGNETRON SPUTTERING SOURCES
(Click on hyperlinks for configuration information)

Note: Other lengths are available as required to meet specific requirements.

Click here to download ordering chart

 

 

TARGET LENGTH

5 INCH WIDE

6 INCH WIDE

FLANGE MOUNT

INTERNAL MOUNT

FLANGE MOUNT

INTERNAL MOUNT

TYPE A P/N

TYPE C P/N

TYPE A P/N

TYPE C P/N

TYPE A P/N

TYPE C P/N

TYPE A P/N

T YPE C P/N

10”

 00000287

 00000288

 00000297

 00000298

 N/A

 N/A

 N/A

N/A

12”

00000088

00000289

 00000036

00000304

00000328

 00000336

 00000342

00000331 

15”

 00000290

 00000291

00000299

 00000293

 00000106

00000343

00000647

 00000344

20”

 00000303

00000292 

00000302

 00000295

 N/A

 00000347

 N/A

00000351

22”

N/A

00000294

N/A

 00000296

 N/A

N/A

 N/A

 N/A

24”

N/A

 00000329

N/A

00000335

 N/A

00000352 

 N/A

00000362

25”

 N/A

 00000330

 N/A

00000345

N/A

  00000249

N/A

00000366

30”

 N/A

00000332

 N/A

 00000346

 N/A

00000360 

 N/A

00000353 

36”

 N/A

 00000333

 N/A

 00000357

N/A 

00000355 

N/A 

 00000369

40”

 N/A

00000334

 N/A

00000350

 N/A

 00000358

 N/A

00000348

48”

 N/A

 00000339

 N/A

00000359

 N/A

 00000370

 N/A

00000371

60”

 N/A

 00000340

 N/A

00000367 

 N/A

 00000314

 N/A

 00000372

65”

 N/A 

 00000341

 N/A 

00000368

 N/A

 00000364

 N/A

00000356

72”

 N/A

 00000310

 N/A

00000361

 N/A

00000365

 N/A

00000363

76”

N/A

 00000338

N/A

 00000354

 N/A

00000337 

 N/A

 00000349

 

 

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Last modified: April 04, 2008