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Linear/Rectangular Sputtering Sources
SCOPE OF DELIVERY - INTERNAL MOUNT- One target backing plate (thickness must be specified when ordering)
- One set of target clamps (type and target thickness must be specified when ordering)
- Ground shield/Anode
- Two each 60” long polypropylene water lines
- One each 36” long argon gas line and union
- 304 CRES KF-50 bulkhead clamp assembly (only for units supplied with KF-50 flange)
- 304 CRES KF-50 centering ring assembly with viton o-ring (only for units supplied with KF-50 flange)
- Specification 10000100 “Rectangular Target, Backing Plate and Target Bonding Requirements”
- Instruction Manual
- Documentation set on CD including: instruction manual, interface control drawing, assembly drawing, target, backing plate and target bonding specifications and drawings, magnet module field profiles
- Spare Parts Kit, including o-rings, fasteners, washers, screw insulators and end caps, water fitting compression sleeves.
SCOPE OF DELIVERY - FLANGE MOUNT - As above, with the addition of protective electrical cap to prevent accidental exposure to high
voltage.
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SUNSOURCE™ MAGNETRON SPUTTERING SOURCES
(Click on hyperlinks for configuration information) Note: Other lengths are available as required to meet specific requirements.  Click here to download ordering chart
TARGET LENGTH | 5 INCH WIDE | 6 INCH WIDE | FLANGE MOUNT | INTERNAL MOUNT | FLANGE MOUNT | INTERNAL MOUNT | TYPE A P/N | TYPE C P/N | TYPE A P/N | TYPE C P/N | TYPE A P/N | TYPE C P/N | TYPE A P/N | T YPE C P/N | 10” | 00000287 | 00000288 | 00000297 | 00000298 | N/A | N/A | N/A | N/A | 12” | 00000088 | 00000289 | 00000036 | 00000304 | 00000328 | 00000336 | 00000342 | 00000331 | 15” | 00000290 | 00000291 | 00000299 | 00000293 | 00000106 | 00000343 | 00000647 | 00000344 | 20” | 00000303 | 00000292 | 00000302 | 00000295 | N/A | 00000347 | N/A | 00000351 | 22” | N/A | 00000294 | N/A | 00000296 | N/A | N/A | N/A | N/A | 24” | N/A | 00000329 | N/A | 00000335 | N/A | 00000352 | N/A | 00000362 | 25” | N/A | 00000330 | N/A | 00000345 | N/A | 00000249 | N/A | 00000366 | 30” | N/A | 00000332 | N/A | 00000346 | N/A | 00000360 | N/A | 00000353 | 36” | N/A | 00000333 | N/A | 00000357 | N/A | 00000355 | N/A | 00000369 | 40” | N/A | 00000334 | N/A | 00000350 | N/A | 00000358 | N/A | 00000348 | 48” | N/A | 00000339 | N/A | 00000359 | N/A | 00000370 | N/A | 00000371 | 60” | N/A | 00000340 | N/A | 00000367 | N/A | 00000314 | N/A | 00000372 | 65” | N/A | 00000341 | N/A | 00000368 | N/A | 00000364 | N/A | 00000356 | 72” | N/A | 00000310 | N/A | 00000361 | N/A | 00000365 | N/A | 00000363 | 76” | N/A | 00000338 | N/A | 00000354 | N/A | 00000337 | N/A | 00000349 |
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