 GEN II
Linear Internal Mount Sputtering Sources
Installation & Interface Control Drawings
STANDARD MOUNTING (UTILITY CONNECTIONS THROUGH REAR FLANGE) CONFIGURATIONS 
Short Internal Mount SunSource GEN II™
with single KF-50 bulkhead flange Internal Mount with Single Feedthrough Flange 90mm Wide  Drawing 00000966,Rev. E.pdf 90mm Wide Internal Mount SunSource GEN II™ Sputter Source with Kamlok™
5" Wide Drawing 00000961, Rev. B.pdf 5" Wide Internal Mount SunSource GEN II™ Sputter Source with Kamlok™
Long Internal Mount SunSource GEN II™
with dual ISO-63 bulkhead flanges - High Power Internal Mount with Two Feedthrough Flanges 90mm Wide Drawing 00001052.pdf 90mm Wide Internal Mount SunSource GEN II™ Sputter Source with Kamlok™ 5" Wide - Short Lengths Drawing 00000949, Rev. B.pdf 5" Wide Internal Mount SunSource GEN II™ Sputter Source - with Kamlok™ 5" Wide - Longer Lengths and Higher Power Drawing 00002450.pdf "Long" 5" Wide Internal Mount SunSource GEN II™ Sputter Source - with Kamlok™ 6" Wide Drawing 00002253.pdf 6" Wide Internal Mount SunSource GEN II™ Sputter Source with Kamlok™
INTERNAL MOUNT WITH ATMOSPHERIC UTILITY HOUSING 
Small profile Internal Mount SunSource GEN II™
with Atmospheric Utility Housing 90mm Wide Drawing 00002214.pdf 90mm Wide Internal Mount SunSource GEN II™ Sputter Source with Feedthrough Housing & Kamlok™
CANTILEVER MOUNT (UTILITY CONNECTIONS THROUGH END OF SOURCE) CONFIGURATIONS 
Small Internal Cantilever Mount SunSource GEN II™
with single KF-50 quick clamp flange Internal Cantilever Mount 90mm Wide Drawing 00002114, Rev. B.pdf 90mm Wide Internal End Mount SunSource GEN II™ Sputter Source with Kamlok™ | Contact factory if the information you need is not presently available online. Interface Control Drawings for our entire range of internal mount sources are constantly being updated |
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