GEN II
Linear Internal Mount Sputtering Sources
Installation & Interface Control Drawings
Small Internal Mount SunSource GEN II™
with single KF-50 bulkhead flange
Internal Mount with Single Feedthrough Flange
90mm Wide
Drawing 00000966.pdf 90mm Wide
Internal Mount SunSource GEN II™ Sputter Source with Kamlok™
5" Wide
Drawing 00000961.pdf 5" Wide
Internal Mount SunSource GEN II™ Sputter Source with Kamlok™
Internal Mount with Two Feedthrough Flanges
5" Wide
Drawing 00000949.pdf 5" Wide
Internal Mount SunSource GEN II™ Sputter Source with Kamlok™
6" Wide
Drawing 00000960.pdf 6" Wide
Internal Mount SunSource GEN II™ Sputter Source with Kamlok™
