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GEN II 
 


Linear Flange Mount Sputtering Sources
Installation & Interface Control Drawings


 

Typical Small SunSource GEN II Flange Mount.jpg (98036 bytes)

 

 

Small Flange Mount SunSource GEN II™
with anodes/ground shields installed on
mounting flange

 

 

 

 

 

Flange Mount with Single Utility Connections

90mm Wide

Drawing 00001047, Rev. B..pdf  90mm Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™

 

5" Wide - Includes Anode/Ground Shields - Single Utility Module - Short Lengths, Lower Power Operation

 

 

Small Flange Mount SunSource GEN II™
with Single Utility Connection Module and
1/2" or 12mm OD push to connect water fittings

 

 

 

 

Drawing 00000962.pdf  5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™

 

5" Wide - No Anode/Ground Shields - Single Utility Module - Short Lengths, Lower Power Operation

 

 

 

 

 

 

 

 

Drawing 00000963.pdf  5" Wide Flange Mount SunSource GEN II™ Sputter Source with  Kamlok™- No Anodes

 

5" Wide - No Bolt Pattern  or Anode/Ground Shields - Minimum Dimensions - Single Utility Module - Short Lengths, Lower Power Operation

Drawing 00000964.pdf  5" Wide Flange Mount SunSource GEN II™ Sputter Source with  Kamlok™- Minimum Dimensions  

 

6" Wide - Includes Anode/Ground Shields - Single Utility Module - Short Lengths, Lower Power Operation

Drawing 00002124.pdf  6" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™


 

Flange Mount with Dual Utility Connections

90mm Wide

Drawing 00002101.pdf  90mm Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™

Drawing 00002995.pdf  90mm Wide Flange Mount SunSource GEN II™ Sputter Source with Insert Style Target Clamping Design

 

5" Wide - No Anode/Ground Shields - Dual Utility Connections - Short Lengths

Drawing 00002206.pdf  5" Wide Flange Mount SunSource GEN II™ Sputter Source with  Kamlok™

5" Wide - Includes Anode/Ground Shields - Dual Utility Connections - Short Lengths

Drawing 00002107, Rev. A.pdf  5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™ or Insert Style Target Clamping Design

5" Wide - Includes Anode/Ground Shields - Dual Utility Connections - Short Lengths and Higher Power

Drawing 00002108.pdf  5" Wide Flange Mount SunSource GEN II™ Sputter Source with  Kamlok™

5" Wide - Includes Anode/Ground Shields - Dual Utility Connections - Longer Sources and Higher Power

 

 

 

 

 

 


 

Drawing 00002110, Rev. C.pdf  5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™ or Insert Style Target Clamping Design

 

6" Wide - Includes Anode/Ground Shields - Dual Utility Connections - Short Lengths

Drawing 00002121, Rev. A.pdf  6" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™

6" Wide - Includes Anode/Ground Shields - Two Internal Gas Distribution Manifolds

Drawing 00000968, Rev. A.pdf  6" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™ and Dual Internal Gas Distribution Manifold


Retrofit Sources

MRC

 

 

 

 

 

 

 

 

Drawing 00000686.pdf  5" x 15" SunSource GEN II™ MRC 600/900 Retrofit  with Kamlok™

Drawing 00002986.pdf  5" x 15" SunSource GEN II™ MRC 600/900 Retrofit  with Insert-Style Target Clamping Design

Drawing 00001084.pdf  90mm x 200mm SunSource GEN II™ MRC 600/900 Retrofit  with Kamlok™

Drawing 00002341, Rev. C.pdf  90mm x 381mm SunSource GEN II™ MRC 600/900 Retrofit  with Kamlok™

 

Sloan

 

 

 

 

 

 

 

 

Drawing 00000793C.pdf  3.5" x 8" SunSource GEN II™ Sloan OrbiTorr  with Kamlok™

 

Contact factory if the information you need is not presently available online.

Interface Control Drawings for our entire range of flange mount sources is constantly being updated.

 

 

 

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Last modified: 26 January 2018