 GEN II
Linear Flange Mount Sputtering Sources
Installation & Interface Control Drawings
Small Flange Mount SunSource GEN II™
with anodes/ground shields installed on
mounting flange Flange Mount with Single Utility Connections 90mm Wide  Drawing 00001047, Rev. B..pdf 90mm Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™
5" Wide - Includes Anode/Ground Shields - Single Utility Module - Short Lengths, Lower Power Operation 
Small Flange Mount SunSource GEN II™
with Single Utility Connection Module and
1/2" or 12mm OD push to connect water fittings Drawing 00000962.pdf 5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™ 5" Wide - No Anode/Ground Shields - Single Utility Module - Short Lengths, Lower Power Operation 
Drawing 00000963.pdf 5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™- No Anodes 5" Wide - No Bolt Pattern or Anode/Ground Shields - Minimum Dimensions - Single Utility Module - Short Lengths, Lower Power Operation Drawing 00000964.pdf 5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™- Minimum Dimensions 6" Wide - Includes Anode/Ground Shields - Single Utility Module - Short Lengths, Lower Power Operation Drawing 00002124.pdf 6" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™
Flange Mount with Dual Utility Connections 90mm Wide Drawing 00002101.pdf 90mm Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™ 5" Wide - No Anode/Ground Shields - Dual Utility Connections - Short Lengths Drawing 00002206.pdf 5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™ 5" Wide - Includes Anode/Ground Shields - Dual Utility Connections - Short Lengths Drawing 00002107.pdf 5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™ 5" Wide - Includes Anode/Ground Shields - Dual Utility Connections - Short Lengths and Higher Power Drawing 00002108.pdf 5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™ 5" Wide - Includes Anode/Ground Shields - Dual Utility Connections - Longer Sources and Higher Power Drawing 00002110, Rev. B.pdf 5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™ 6" Wide - Includes Anode/Ground Shields - Dual Utility Connections - Short Lengths Drawing 00002121, Rev. A.pdf 6" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™ 6" Wide - Includes Anode/Ground Shields - Two Internal Gas Distribution Manifolds Drawing 00000968, Rev. A.pdf 6" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™ and Dual Internal Gas Distribution Manifold
Retrofit Sources MRC 
Drawing 00000686.pdf 5" x 15" SunSource GEN II™ MRC 600/900 Retrofit with Kamlok™ Drawing 00001084.pdf 90mm x 200mm SunSource GEN II™ MRC 600/900 Retrofit with Kamlok™ Drawing 00002341.pdf 90mm x 381mm SunSource GEN II™ MRC 600/900 Retrofit with Kamlok™ Sloan 
Drawing 00000793C.pdf 3.5" x 8" SunSource GEN II™ Sloan OrbiTorr with Kamlok™ | Contact factory if the information you need is not presently available online. Interface Control Drawings for our entire range of flange mount sources is constantly being updated. |
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