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 GEN II
Linear Flange Mount Sputtering Sources
Installation & Interface Control Drawings
 Small Flange Mount SunSource GEN II™
with anodes/ground shields installed on
mounting flange Flange Mount with Single
Utility Connections 90mm Wide
Drawing 00001047, Rev. B..pdf 90mm Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™
Drawing 00003085..pdf 90mm Wide Flange Mount SunSource GEN II™ Sputter Source with
Insert Style Target Clamping Design
5" Wide - Includes Anode/Ground Shields -
Single Utility Module - Short Lengths, Lower Power Operation
Small Flange Mount SunSource GEN II™
with Single Utility
Connection Module and
1/2" or 12mm OD push to connect water fittings
Drawing 00000962.pdf 5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™
5" Wide - No Anode/Ground Shields
- Single Utility Module - Short Lengths, Lower
Power Operation
Drawing 00000963.pdf 5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™- No Anodes
5" Wide - No Bolt Pattern or Anode/Ground Shields - Minimum Dimensions
- Single Utility Module - Short Lengths, Lower
Power Operation
Drawing 00000964.pdf 5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™-
Minimum Dimensions
6" Wide - Includes
Anode/Ground Shields - Single Utility Module - Short Lengths, Lower Power
Operation
Drawing 00002124.pdf
6" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™
Flange Mount with Dual Utility Connections 90mm Wide
Drawing 00002101.pdf 90mm Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™
Drawing 00002995.pdf 90mm Wide Flange Mount SunSource GEN II™ Sputter Source with
Insert Style Target Clamping Design
5" Wide - No Anode/Ground Shields - Dual Utility Connections - Short Lengths
Drawing 00002206.pdf 5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™
5" Wide - Includes
Anode/Ground Shields - Dual Utility Connections - Short Lengths
Drawing 00002107, Rev. A.pdf 5" Wide Flange Mount SunSource GEN II™ Sputter Source with
Kamlok™ or Insert Style Target Clamping Design
5" Wide - Includes
Anode/Ground Shields - Dual Utility Connections - Short Lengths and Higher Power
Drawing 00002108.pdf 5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™
5" Wide - Includes
Anode/Ground Shields - Dual Utility Connections - Longer Sources and Higher
Power
Drawing 00002110, Rev. C.pdf 5" Wide Flange
Mount SunSource GEN II™ Sputter Source with Kamlok™ or Insert Style Target
Clamping Design
6" Wide - Includes
Anode/Ground Shields - Dual Utility Connections - Short Lengths
Drawing 00002121, Rev. A.pdf 6" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™
6" Wide - Includes Anode/Ground Shields - Two Internal
Gas Distribution Manifolds
Drawing
00000968, Rev. A.pdf 6" Wide Flange Mount SunSource GEN II™
Sputter Source with Kamlok™ and Dual Internal Gas Distribution Manifold
Retrofit Sources MRC
Drawing 00000686.pdf 5" x 15" SunSource GEN II™ MRC 600/900 Retrofit with Kamlok™
Drawing 00002986.pdf 5" x 15" SunSource GEN II™ MRC 600/900 Retrofit with
Insert-Style Target Clamping Design Drawing 00001084.pdf 90mm x 200mm SunSource GEN II™ MRC 600/900 Retrofit with Kamlok™
Drawing 00002341, Rev. C.pdf 90mm x 381mm SunSource GEN II™ MRC 600/900 Retrofit with Kamlok™
Sloan
Drawing 00000793C.pdf 3.5" x 8" SunSource GEN II™ Sloan OrbiTorr with Kamlok™ | Contact factory if the information you need is not presently available online. Interface Control Drawings for our entire range of flange mount sources is constantly being updated. |
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