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GEN II 

Linear Flange Mount Sputtering Sources
Installation & Interface Control Drawings

 

Typical Small SunSource GEN II Flange Mount.jpg (98036 bytes)

 

 

Small Flange Mount SunSource GEN II™
with anodes/ground shields installed on
mounting flange

 

 

 

 

 

Flange Mount with Single Feedthrough Flange

5" Wide - Includes Anode/Ground Shields

Drawing 00000962.pdf  5" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™

5" Wide - No Anode/Ground Shields

Drawing 00000963.pdf  5" Wide Flange Mount SunSource GEN II™ Sputter Source with  Kamlok™- No Anodes

5" Wide - No Bolt Pattern  or Anode/Ground Shields - Minimum Dimensions

Drawing 00000964.pdf  5" Wide Flange Mount SunSource GEN II™ Sputter Source with  Kamlok™- Minimum Dimensions

 

6" Wide - Includes Anode/Ground Shields

Drawing 00000968.pdf  6" Wide Flange Mount SunSource GEN II™ Sputter Source with Kamlok™
and Dual Internal Gas Distribution Manifold

 

Retrofit Sources

MRC

Drawing 00000686.pdf  5" x 15" SunSource GEN II™ MRC 600/900 Retrofit  with Kamlok™

 

Contact factory if the information you need is not presently available online.

Interface Control Drawings for our entire range of flange mount sources is constantly being updated.

 

 

 

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Last modified: April 04, 2008