GEN II
Linear Flange Mount Sputtering Sources
Installation & Interface Control Drawings

Small Flange Mount SunSource GEN II™
with anodes/ground shields installed on
mounting flange
Flange Mount with Single Feedthrough Flange
5" Wide - Includes Anode/Ground Shields
Drawing 00000962.pdf 5" Wide
Flange Mount SunSource GEN II™ Sputter Source with Kamlok™
5" Wide - No Anode/Ground Shields
Drawing 00000963.pdf 5" Wide
Flange Mount SunSource GEN II™ Sputter Source with Kamlok™- No Anodes
5" Wide - No Bolt Pattern or Anode/Ground
Shields - Minimum Dimensions
Drawing 00000964.pdf 5" Wide
Flange Mount SunSource GEN II™ Sputter Source with Kamlok™- Minimum
Dimensions
6" Wide - Includes Anode/Ground Shields
Drawing 00000968.pdf 6" Wide
Flange Mount SunSource GEN II™ Sputter Source with Kamlok™
and Dual Internal Gas Distribution Manifold
Retrofit Sources
MRC
Drawing 00000686.pdf 5" x
15" SunSource GEN II™ MRC 600/900 Retrofit with Kamlok™