Round Flange Mount Magnetron Sputtering
Sources Installation & Interface Control Drawings

4 inch Flange Mount SunSource™ 
Sputtering Source on ISO 160 Flange

Click "Viewer Downloads" above to download  Adobe Acrobat Reader required to open, read and print the specifications on this page.

Drawing Blocks are in native AutoCAD .dwg format and zipped to allow download.  They may be inserted directly into the users system drawing when designing a new system or retrofitting an existing system.

Drawing 00001021.pdf  4" Flange Mount SunSource™ Sputter Source

AutoCAD 2000i .dwg Drawing Block - Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Top View  (zipped file)

Drawing 00000600.pdf   8" Flange Mount SunSource™ Sputter Source
AutoCAD 2000i .dwg Drawing Block - Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Top View  (zipped file)

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Last modified: April 04, 2008