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Round Flange Mount Magnetron Sputtering
Sources Installation & Interface Control Drawings

 

 

 

 

4 inch Flange Mount SunSource™ 
Sputtering Source on ISO 160 Flange

 

 

 

 

 

 

 

Drawing Blocks are in native AutoCAD 2000 .dwg format and zipped to allow download.
They may be inserted directly into the users system drawing when designing a new system or retrofitting an existing system.

Drawing 00001021.pdf  4" Flange Mount SunSource™ Sputter Source
AutoCAD 2000i .dwg Drawing Block - Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Top View  (zipped file)

Drawing 00000847, Rev. B.pdf  6" Flange Mount SunSource™ Sputter Source
AutoCAD 2000i .dwg Drawing Block - Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Side View with Safety Enclosure  (zipped file)
AutoCAD 2000i .dwg Drawing Block - Top View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Top View with Safety Enclosure  (zipped file)


Drawing 00002142, Rev. B.pdf  8" Flange Mount SunSource™ Sputter Source
AutoCAD 2000i .dwg Drawing Block - Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Side View with Safety Enclosure  (zipped file)
AutoCAD 2000i .dwg Drawing Block - Top View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Top View with Safety Enclosure  (zipped file)



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Last modified: 26 February 2017