Home
Up

 

 

&


Target Fabrication, Backing Plate & Target Bonding Requirements


 

Note: Drawing date controls when design was implemented/sold/delivered.  See Assembly Drawing
on Documentation CD supplied with sputtering source to determine which drawings should be used.

 

Round Sources

Universal Target and Target Bonding Requirements

Specification 10000000, Rev. E Round Target and Target Bonding Requirements

 

 

 

Note: Specific size drawings are provided with each source for targets, backing plates
and bonded target assemblies.  Use the following generic drawings if they are not available to you.

Drawing 00000273, Rev. A Round Target Bonding Requirements

Drawing 00000274 Round Target Fabrication Requirements
 



Specific Diameter Target Drawings

2"Drawing 00000073, Rev. A

2"Drawing 00000066 - Direct Water Cooled

3"Drawing 00000709

3"Drawing 00000708 - Direct Water Cooled

4"Drawing 00000313

6"Drawing 00000611

6"Drawing 00000120- Direct Water Cooled

8"Drawing 00000319

8"Drawing 00000321 - Direct Water Cooled
 


Specific Diameter Target Backing Plates

The appropriate target backing plate fabrication drawing is included in the Documentation CD provided with the source at the time of sale.  The material of construction (molybdenum, copper or stainless steel) and thickness required are dependent upon the target material and other factors.  Contact factory for pricing and details.

 

 



Specific Diameter Bonded Target Assembly Requirements

 

 

 

 

 

2"Drawing 00000774

3"Drawing 00002092

4"Drawing 00001008

6"Drawing 00000273, Rev. A

8"Drawing 00000175
 


 

Linear Sources

Universal Rectangular Target and Target Bonding Requirements

Specification 1000100, Rev. C

 

Note: Specific size drawings are provided with each source for targets, backing plates
and bonded target assemblies.  Use the following generic drawings if they are not available to you.

Drawing 00000714, Rev. A Target Bonding Requirements, Rectangular

Drawing 00000715, Rev. B  Fabrication Requirements, Rectangular Targets
 


Specific Size & Configuration Rectangular Target Drawings

The appropriate target fabrication drawing is included in the Documentation CD provided with the source at the time of sale.  Use the drawings provided above or contact the factory if they are not available to you.

 


 



Rectangular Target Backing Plates

The appropriate target backing plate fabrication drawing is included in the Documentation CD provided with the source at the time of sale.  The material of construction (molybdenum, copper or stainless steel) and thickness required are dependent upon the target material and other factors.  Contact factory for pricing and details.



 



Specific Size Bonded Target Assembly Requirements

The appropriate bonded target assembly drawing is included in the Documentation CD provided with the source at the time of sale.  Use the drawings provided above or contact the factory if they are not available to you.

 

Home Site Map

Copyright 1993-2014 Materials Science, Inc.
Last modified: 02 January 2014