Documentation

APPLICATION NOTES

Grounding of High Power DC Sputtering Power Supplies

DRAWINGS

Polaris™ Research Sputtering Sources Installation & Interface Control Drawings

SunSource™ Rectangular, ("Type A"), Internal Mount Sputtering Sources Installation and Dimensional Data

SunSource™ Rectangular Flange Mount Sputtering Sources Installation and Dimensional Data

SunSource™ Round Internal Mount Sputtering Sources Installation & Interface Control Drawings

SunSource™ Round Flange Mount Sputtering Sources Installation & Interface Control Drawings

SunSource™ and Polaris™ Target, Target Backing Plate and Target Bonding Drawings

 

INSTRUCTION MANUALS

Polaris™ Research Sputtering Sources

SunSource™ Round Sputtering Sources

SunSource™ Linear, "Type A" Sputtering Sources

SPECIFICATIONS

Specification 10000000B Round Target, Backing Plate and Bonding  Requirements

Specification 10000100A Rectangular Target, Backing Plate and Bonding Requirements

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Last modified: April 04, 2008