Documentation
APPLICATION NOTES Grounding of High Power DC Sputtering Power Supplies
DRAWINGS Polaris™ Research Sputtering Sources Installation & Interface Control Drawings SunSource™ Linear Internal Mount Sputtering Sources Installation and Dimensional Data SunSource™ Linear Flange Mount Sputtering Sources Installation and Dimensional Data SunSource™ Round Internal Mount Sputtering Sources Installation & Interface Control Drawings SunSource™ Round Flange Mount Sputtering Sources Installation & Interface Control Drawings SunSource™ and Polaris™ Target, Target Backing Plate and Target Bonding Drawings
INSTRUCTION MANUALS FOR LEGACY PRODUCTS
(Generally for sources sold & delivered prior to January, 2007) Polaris™ Research Sputtering Sources SunSource™ Round Sputtering Sources SunSource™ Linear, "Type A" Sputtering Sources
SPECIFICATIONS Specification 10000000D Round Target, Backing Plate and Bonding Requirements Specification 10000100B Rectangular Target, Backing Plate and Bonding Requirements
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