Round
Internal Mount Magnetron Sputtering
Sources Installation & Interface Control Drawings
4 Inch SunSource™ Magnetron Sputtering Source with Ground
Shield/Anode Removed. All water, power and gas connections are made
at atmosphere within vacuum feedthrough.
Click "Viewer Downloads" above to download Adobe Acrobat
Reader required to open, read and print the specifications on this page.
Drawing Blocks are in native AutoCAD .dwg format and zipped to
allow download. They may be inserted directly into the users system
drawing when designing a new system or retrofitting an existing system.
Drawing 00000250A.pdf 4"
Internal Mount SunSource™ Sputter Source
AutoCAD 2000i .dwg Drawing Block - Side View
(zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View
(zipped file)
Drawing 00000178D.pdf 6" Internal SunSource™ Sputter Source
AutoCAD 2000i .dwg Drawing Block - Side View
(zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View
(zipped file)
Drawing 00000416A.pdf 8" Internal SunSource™ Sputter Source,
KF-50 Flange
AutoCAD 2000i .dwg Drawing Block - Side View
(zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View
(zipped file)
Drawing 00000710.pdf 8"
Internal SunSource™ Sputter Source, 3.375" CF Flange
AutoCAD 2000i .dwg Drawing Block - Side View
(zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View
(zipped file)
Drawing
00000270A.pdf X-Y-X Adjustable Positioning Feedthrough Assembly
