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 Round Internal Mount Magnetron Sputtering Sources
 Installation, Interface Control Drawings & Drawing Blocks

 

 

4 Inch SunSource™ Magnetron Sputtering Source
with Ground Shield/Anode Removed.   All water, power
and gas connections are made at atmosphere within vacuum feedthrough.

 

 

 

 

 

 

 

Drawing Blocks are in native AutoCAD 2000 .dwg format and zipped to allow download. 
They may be inserted directly into the users system drawing when designing a new system or retrofitting an existing system.

Basic Source Only

Drawing 00001025.pdf  4" Internal Mount SunSource™ GEN II Sputter Source
AutoCAD 2000i .dwg Drawing Block - Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View  (zipped file)

Drawing 00002130, Rev.B.pdf  6" Internal SunSource™ GEN II Sputter Source
AutoCAD 2000i .dwg Drawing Block - Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View  (zipped file)

Drawing 00000178D.pdf  6" Internal SunSource™ Sputter Source - Legacy Design
AutoCAD 2000i .dwg Drawing Block - Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View  (zipped file)

Drawing 00002144, Rev. C.pdf  8" Internal SunSource™ GEN II Sputter Source
AutoCAD 2000i .dwg Drawing Block - Side Views (zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View  (zipped file)

 

With Feedthrough Assemblies and Options

Drawing 00001029.pdf  4" Internal Mount SunSource™ GEN II Sputter Source - 1" Baseplate Feedthrough
AutoCAD 2000i .dwg Drawing Block - Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View (zipped file)

Drawing 00001042.pdf  4" Internal Mount SunSource™ GEN II Sputter Source - 32,5mm Baseplate Feedthrough

Drawing 00002953.pdf  4" Internal Mount SunSource™ GEN II Sputter Source - With Shutter

Drawing 00002852.pdf  4" Internal Mount SunSource™ GEN II Sputter Source - 3/4" OD Tube Variable Position with Shutter- 1" Baseplate Feedthrough

Drawing 00001044.pdf  4" Internal Mount SunSource™ GEN II Sputter Source - 3/4" OD Tube Variable Position with Tilt and Shutter- 1" Baseplate Feedthrough

Drawing 00001088, Rev. A.pdf  4" Internal Mount SunSource™ GEN II Sputter Source - 1" OD Tube RF/DC Feedthrough

Drawing 00002473.pdf  4" Internal Mount SunSource™ GEN II Sputter Source - 1.5" OD Tube with Tilt and Shutter

Drawing 00002598.pdf  4" Internal Mount SunSource™ GEN II Sputter Source - 1.5" OD Tube, Variable Position with Tilt and Shutter on 4" ASA Flange
 

Drawing 00002592.pdf  6" Internal Mount SunSource™ GEN II Sputter Source -  with Shutter

Drawing 00002703A.pdf  6" Internal Mount SunSource™ GEN II Sputter Source - 1-5" OD Tube Variable Position Feedthrough

Drawing 00002376.pdf  6" Internal Mount SunSource™ GEN II Sputter Source - 1-5" OD Tube Variable Position Feedthrough and Tilt

Drawing 00002860.pdf  6" Internal Mount SunSource™ GEN II Sputter Source - 1-5" OD Tube Variable Position Feedthrough with Shutter and Tilt

 

Drawing 00002570.pdf  8" Internal Mount SunSource™ GEN II Sputter Source -  with Shutter
 

Drawing 00002145, Rev. A.pdf  8" Internal SunSource™ GEN II Sputter Source - 1.5" OD Tube Feedthrough and Tilt
AutoCAD 2000i .dwg Drawing Block - Side View 1 - Tube Only (zipped file)
AutoCAD 2000i .dwg Drawing Block - Side View 2 - Tube Only (zipped file)
AutoCAD 2000i .dwg Drawing Block - Side View - 30° Tilt Angle - Tube Only  (zipped file)
AutoCAD 2000i .dwg Drawing Block - Side View 1 - HN Power Connector (zipped file)
AutoCAD 2000i .dwg Drawing Block - Side View  2 - HN Power Connector (zipped file)
AutoCAD 2000i .dwg Drawing Block - Side View - 30° Tilt Angle - HN Power Connector   (zipped file)

 

Feedthrough Assemblies Only

Drawing 000002859.pdf  Adaptor Kit, KF-50 to 1.5" OD Tube Compression Fitting

Drawing 00000270A.pdf  X-Y-X Adjustable Positioning Feedthrough Assembly

 

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Last modified: 26 February 2017