Interface Control Drawings & Drawing Blocks
2 Inch Sources 3 Inch Sources Adaptors & Misc. Parts 2" Internal Mount Polaris™ Sputtering Source and Complete Assemblies Basic Source 
 Drawing 00000773, Rev. B 2" with KF-40 bulkhead flange
 AutoCAD 2000i .dwg Drawing Block - 2" Internal Side View-1 (zipped file)
AutoCAD 2000i .dwg Drawing Block - 2" Internal Side View-2 (zipped file)
AutoCAD 2000i .dwg Drawing Block - 2" Internal Bottom View (zipped file)
AutoCAD 2000i .dwg Drawing Block - 2" Internal Top View (zipped file)
Fixed Position 1" Baseplate RF/DC Feedthrough 
Drawing 00000784 2" with KF-40 to 1" baseplate RF/DC feedthrough assembly
Fixed Position 1" Baseplate RF/DC Feedthrough with Shutter 
Drawing 00002244 2" with KF-40 to 1" baseplate RF/DC feedthrough assembly with shutter Fixed Position 1" Baseplate DC Feedthrough
Drawing 00000786 2" with KF-40 to 1" baseplate DC feedthrough assembly Variable Position - 1" RF/DC Baseplate Feedthrough 
Drawing 00000785 2" RF/DC with variable position 3/4" OD tube feedthrough assembly Variable Position - 2.75" OD Flange RF/DC Baseplate Feedthrough
Drawing 00002510 2" on 2.75" OD CF Flange RF/DC with variable position 3/4" OD tube feedthrough assembly Variable Position with Shutter - 1" RF/DC Baseplate Feedthrough
Drawing 00002173 2" RF/DC with shutter & variable position 3/4" OD tube feedthrough assembly
AutoCAD 2000i .dwg Drawing Block - 2" Side View - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 2" Side View - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 2" Side View - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 2" Side View - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 2" Top View - Shutter Open (zipped file) Variable Position - Right Angle Head - 2.75" OD CF Mounting Flange
Drawing 00000336 2" RF/DC right angle head with variable position 3/4" OD tube feedthrough assembly Variable Position & Tilt - 1" RF/DC Baseplate Feedthrough
Drawing 00000928, Rev. A 2" RF/DC with tilt mechanism & variable position 3/4" OD tube feedthrough assembly Variable Position, Tilt & Shutter - 1" RF/DC Baseplate Feedthrough 
Drawing 00002200 2" RF/DC with tilt mechanism, rotating shutter with 1" baseplate feedthrough & variable position 3/4" OD tube compression fitting 8" OD CF Flange Mounted Variable Position with Shutter
Drawing 00000931, Rev. A 2" RF/DC on 8" OD CF Flange with tilt mechanism & variable position 3/4" OD tube compression fitting 8" OD CF Flange Mounted Variable Position with Tilt & Shutter 
Drawing 00000947, Rev. A 2" RF/DC on 8" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting
3" Internal Mount Polaris™ Sputtering Source and Complete Assemblies Basic Source
Drawing 00000278, Rev. C 3" with KF-40 bulkhead flange (English (inch) fasteners)
Drawing 00002093 3" with KF-40 bulkhead flange metric fasteners)
AutoCAD 2000i .dwg Drawing Block - 3" Internal Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Internal Bottom View (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Internal Top View (zipped file) Fixed Position 1" Baseplate RF/DC Feedthrough
Drawing 00000719 3" with KF-40 to 1" baseplate RF/DC feedthrough assembly Fixed Position 1" Baseplate DC Feedthrough
Drawing 00000792 3" with KF-40 to 1" baseplate DC feedthrough assembly Variable Position - 1" RF/DC Baseplate Feedthrough 
Drawing 00000791, Rev. A 3" RF/DC with variable position 3/4" OD tube feedthrough assembly Variable Position with Shutter - 1" RF/DC Baseplate Feedthrough
Drawing 00002172 3" RF/DC with shutter & variable position 3/4" OD tube feedthrough assembly
AutoCAD 2000i .dwg Drawing Block - 3" Side View - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Top View - Shutter Open (zipped file) Variable Position & Tilt - 1" RF/DC Baseplate Feedthrough
Drawing 00002135 3" RF/DC with tilt mechanism & variable position 3/4" OD tube compression fitting
AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - DIN 7/16 Connector (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - DIN 7/16 Connector (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Top View (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - HN Connector (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - HN Connector (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - HN Connector (zipped file)
Variable Position, Tilt & Shutter - 1" RF/DC Baseplate Feedthrough
Drawing 00002118 3" RF/DC with tilt mechanism, rotating shutter with 1" baseplate feedthrough & variable position 3/4" OD tube compression fitting
AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Top View - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - HN Connector - Shutter Open (zipped file)
6" OD (DN 100) CF Flange Mounted Variable Position
Drawing 00002508 3" RF/DC on 6" OD CF Flange with variable position 3/4" OD tube feedthrough assembly 8" OD CF Flange Mounted Variable Position with Shutter
Drawing 00002158 3" RF/DC on 8" OD CF Flange with shutter and variable position 3/4" OD tube compression fitting
AutoCAD 2000i .dwg Drawing Block - 3" Side View - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Top View - Shutter Open (zipped file)
8" OD CF Flange Mounted Variable Position with Tilt & Shutter
Drawing 00002157 3" RF/DC on 8" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting
AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Top View - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - HN Connector - Shutter Open (zipped file)
Adaptors and Misc. Parts Baseplate Adaptors 
Drawing 00000581 Baseplate Adaptor, 32.5mm to 1"
Legacy Drawings - No Longer Sold Drawing 00000197A.pdf 2" Polaris™ Basic Internal Mount Sputter Source with KF-40 Flange Drawing 0000049A.pdf 2" Internal Polaris™ with 1" RF/DC Baseplate Feedthrough Drawing 0000056A.pdf 2" Internal Polaris™ with 1" DC Baseplate Feedthrough | 
