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Interface Control Drawings & Drawing Blocks


2 Inch Sources

3 Inch Sources

Adaptors & Misc. Parts

 

2" Internal Mount Polaris™ Sputtering Source and Complete Assemblies

Basic Source

   Drawing 00000773, Rev. B  2" with KF-40 bulkhead flange
   AutoCAD 2000i .dwg Drawing Block - 2" Internal Side View-1 (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 2" Internal Side View-2 (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 2" Internal Bottom View  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 2" Internal Top View  (zipped file)

 

Fixed Position 1" Baseplate RF/DC Feedthrough



    Drawing 00000784 2" with KF-40 to 1" baseplate RF/DC feedthrough assembly

 

 

 

Fixed Position 1" Baseplate RF/DC Feedthrough with Shutter

 

 

    Drawing 00002244 2" with KF-40 to 1" baseplate RF/DC feedthrough assembly with shutter

 

 

 

 

 

Fixed Position 1" Baseplate DC Feedthrough

 

    Drawing 00000786 2" with KF-40 to 1" baseplate DC feedthrough assembly

 

 

 

Variable Position - 1" RF/DC Baseplate Feedthrough

 

    Drawing 00000785 2" RF/DC with variable position 3/4" OD tube feedthrough assembly

 

 

 

Variable Position - 2.75" OD CF Flange RF/DC Baseplate Feedthrough

 

    Drawing 00002510 2" on 2.75" OD CF Flange RF/DC with variable position 3/4" OD tube feedthrough assembly

 


 

Variable Position - 4.5" OD CF Flange RF/DC Baseplate Feedthrough

 

    Drawing 00002919 2" on 4.5" OD CF Flange RF/DC with variable position 3/4" OD tube feedthrough assembly

 


 

Variable Position with Shutter - 1" RF/DC Baseplate Feedthrough

    Drawing 00002173  2" RF/DC with shutter & variable position 3/4" OD tube feedthrough assembly  
   AutoCAD 2000i .dwg Drawing Block - 2" Side View - DIN 7/16 Connector - Shutter Closed (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 2" Side View - DIN 7/16 Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 2" Side View - HN Connector - Shutter Closed  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 2" Side View - HN Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 2" Top View - Shutter Open  (zipped file)

 

 

Variable Position -  Right Angle Head - 2.75" OD CF Mounting Flange

 

    Drawing 00000336 2" RF/DC right angle head with variable position 3/4" OD tube feedthrough assembly

 

 

 

Variable Position & Tilt - 1" RF/DC Baseplate Feedthrough

 

    Drawing 00000928, Rev. A  2" RF/DC with tilt mechanism & variable position 3/4" OD tube feedthrough assembly

 

 

 

Variable Position, Tilt & Shutter - 1" RF/DC Baseplate Feedthrough

 

 

    Drawing 00002200 2" RF/DC with tilt mechanism, rotating shutter with 1" baseplate feedthrough & variable position 3/4" OD tube compression fitting

 

 

 

 

 

8" OD (DN 200) CF Flange Mounted Variable Position with Shutter

 

    Drawing 00000931, Rev. A  2" RF/DC on 8" OD CF Flange with tilt mechanism & variable position 3/4" OD tube compression fitting

 

 

 

4.5" OD CF Flange Mounted Variable Position with Tilt & Shutter

 

    Drawing 00002602  2" RF/DC on 4.5" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting

 

 

6" OD (DN 160) CF Flange Mounted Variable Position with Tilt & Shutter

 

 

    Drawing 00002850 2" RF/DC on 6" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting

 

 

 

 

8" OD (DN 200) CF Flange Mounted Variable Position with Tilt & Shutter

 

 

    Drawing 00000947, Rev. A  2" RF/DC on 8" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting

 

 

 

 

 


 

3" Internal Mount Polaris™ Sputtering Source and Complete Assemblies

Basic Source - KF-40 Mounting Flange

   Drawing 00000278, Rev. C  3" with KF-40 bulkhead flange (English (inch) fasteners)
   Drawing 00002093 3" with KF-40 bulkhead flange metric fasteners)
   AutoCAD 2000i .dwg Drawing Block - 3" Internal Side View (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Internal Bottom View  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Internal Top View  (zipped file)

 

Basic Source - 3 3/8" CF Mounting Flange

 

    Drawing 00002673 3" with 3 3/8" CF flange

 

 

Fixed Position 1" Baseplate RF/DC Feedthrough

 

    Drawing 00000719 3" with KF-40 to 1" baseplate RF/DC feedthrough assembly

 

 

Fixed Position 1" Baseplate DC Feedthrough

 

    Drawing 00000792 3" with KF-40 to 1" baseplate DC feedthrough assembly

 

 

Variable Position - 1" RF/DC Baseplate Feedthrough

 

    Drawing 00000791, Rev. A  3" RF/DC with variable position 3/4" OD tube feedthrough assembly

 

 

Variable Position with Shutter - 1" RF/DC Baseplate Feedthroughs for Adjustable Height & Rotary Feedthrough

    Drawing 00002172  3" RF/DC with shutter & variable position 3/4" OD tube feedthrough assembly
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - DIN 7/16 Connector - Shutter Closed (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - DIN 7/16 Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - HN Connector - Shutter Closed  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - HN Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Top View - Shutter Open  (zipped file)

 

Variable Position with Shutter - RF/DC Adjustable Height Feedthrough - 1.33" CF Rotary Feedthrough

    Drawing 00002928  3" RF/DC with shutter & variable position 3/4" OD tube feedthrough assembly

 

 

 

 

Variable Position & Tilt - 1" RF/DC Baseplate Feedthrough

    Drawing 00002135 3" RF/DC with tilt mechanism & variable position 3/4" OD tube compression fitting
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - DIN 7/16 Connector (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - DIN 7/16 Connector (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector (zipped file)

   AutoCAD 2000i .dwg Drawing Block - 3" Top View (zipped file)

   AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - HN Connector (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - HN Connector (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - HN Connector (zipped file)


 

Variable Position, Tilt & Shutter - 1" RF/DC Baseplate Feedthrough

    Drawing 00002118 3" RF/DC with tilt mechanism, rotating shutter with 1" baseplate feedthrough & variable position 3/4" OD tube compression fitting
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - DIN 7/16 Connector - Shutter Closed (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - DIN 7/16 Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - DIN 7/16 Connector - Shutter Closed  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - DIN 7/16 Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector - Shutter Closed  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector - Shutter Open  (zipped file)


   AutoCAD 2000i .dwg Drawing Block - 3" Top View - Shutter Open  (zipped file)


   AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - HN Connector - Shutter Closed (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - HN Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - HN Connector - Shutter Closed  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - HN Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - HN Connector - Shutter Closed  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - HN Connector - Shutter Open  (zipped file)


 

6" OD (DN 160) CF Flange Mounted Variable Position

 

    Drawing 00002508  3" RF/DC on 6" OD CF Flange with variable position 3/4" OD tube feedthrough assembly

 

 

8" OD (DN 200) CF Flange Mounted Variable Position

 

    Drawing 00002907  3" RF/DC on 8" OD CF Flange with variable position 3/4" OD tube feedthrough assembly

 

 

8" OD (DN 200) CF Flange Mounted Variable Position with Shutter

   Drawing 00002158 3" RF/DC on 8" OD CF Flange with shutter and variable position 3/4" OD tube compression fitting
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - DIN 7/16 Connector - Shutter Closed (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - DIN 7/16 Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - HN Connector - Shutter Closed  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - HN Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Top View - Shutter Open  (zipped file)
 

8" OD (DN 200) CF Flange Mounted Variable Position with Tilt & Shutter

    Drawing 00002157 3" RF/DC on 8" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - DIN 7/16 Connector - Shutter Closed (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - DIN 7/16 Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - DIN 7/16 Connector - Shutter Closed  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - DIN 7/16 Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector - Shutter Closed  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector - Shutter Open  (zipped file)

   AutoCAD 2000i .dwg Drawing Block - 3" Top View - Shutter Open  (zipped file)


   AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - HN Connector - Shutter Closed (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 1 - HN Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - HN Connector - Shutter Closed  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View 2 - HN Connector - Shutter Open  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - HN Connector - Shutter Closed  (zipped file)
   AutoCAD 2000i .dwg Drawing Block - 3" Side View - 30 Degree Tilt Angle - HN Connector - Shutter Open  (zipped file)

 

10" OD (DN 250) CF Flange Mounted Variable Position

 

    Drawing 00002714  3" RF/DC on 10" OD CF Flange with variable position 3/4" OD tube feedthrough assembly

 

 

EXTERNAL MOUNT CONFIGURATIONS

3" Externally Mounted Source on ISO 160 Mounting Flange

 

    Drawing 00002879 3" Flange Mounted Source on ISO 160 Mounting Flange

 

 


 

Adaptors and Misc. Parts

Baseplate Adaptors

 

    Drawing 00000581 Baseplate Adaptor, 32.5mm to 1"

 

 

 

 


 

Legacy Drawings - No Longer Sold

Drawing 00000197A.pdf  2" Polaris™ Basic Internal Mount Sputter Source with KF-40 Flange

Drawing 0000049A.pdf  2" Internal Polaris™ with 1" RF/DC Baseplate Feedthrough

Drawing 0000056A.pdf  2" Internal Polaris™ with 1" DC Baseplate Feedthrough

 

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Last modified: 07 August 2016