Interface Control Drawings & Drawing Blocks
2 Inch Sources
3 Inch Sources
Adaptors &
Misc. Parts
2" Internal Mount Polaris™ Sputtering Source and Complete Assemblies
Basic Source
  Drawing 00000773, Rev. B 2" with KF-40 bulkhead flange
AutoCAD 2000i .dwg Drawing Block - 2" Internal Side View-1 (zipped file)
AutoCAD 2000i .dwg Drawing Block - 2" Internal Side View-2 (zipped file)
AutoCAD 2000i .dwg Drawing Block - 2" Internal Bottom View (zipped file)
AutoCAD 2000i .dwg Drawing Block - 2" Internal Top View (zipped file)
Fixed Position 1" Baseplate RF/DC Feedthrough
Drawing 00000784 2" with KF-40 to 1" baseplate RF/DC feedthrough assembly
Fixed Position 1" Baseplate RF/DC Feedthrough with
Shutter
Drawing 00002244 2" with KF-40 to 1" baseplate RF/DC feedthrough assembly
with shutter
Fixed Position 1" Baseplate DC Feedthrough
Drawing 00000786 2" with KF-40 to 1" baseplate DC feedthrough assembly
Variable Position - 1" RF/DC Baseplate Feedthrough
Drawing 00000785 2" RF/DC with variable position 3/4" OD tube feedthrough assembly
Variable Position - 2.75" OD CF Flange RF/DC Baseplate Feedthrough
Drawing 00002510 2" on 2.75" OD CF Flange RF/DC with variable position 3/4" OD tube feedthrough assembly
Variable Position - 4.5" OD CF Flange RF/DC Baseplate Feedthrough
Drawing 00002919 2" on 4.5" OD CF Flange RF/DC with variable position 3/4" OD tube feedthrough assembly
Variable Position with Shutter - 1" RF/DC Baseplate Feedthrough
Drawing 00002173
2" RF/DC with
shutter & variable position 3/4" OD tube feedthrough assembly
AutoCAD 2000i .dwg Drawing Block
- 2" Side View - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
2" Side View - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 2" Side View - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
2" Side View - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 2" Top
View - Shutter Open (zipped file)
Variable Position with Shutter - 4.5" CF OD CF Flange RF/DC
Baseplate Feedthrough
Drawing 00004026
2" RF/DC with
shutter & variable position 3/4" OD tube feedthrough assembly
Variable Position - Right Angle Head - 2.75" OD CF Mounting Flange
Drawing 00000336 2" RF/DC right angle head with variable position 3/4" OD tube feedthrough assembly
Variable Position & Tilt - 1" RF/DC Baseplate Feedthrough
Drawing 00000928,
Rev. A 2" RF/DC with tilt mechanism & variable position 3/4" OD tube feedthrough assembly
Variable Position, Tilt
& Shutter - 1" RF/DC Baseplate Feedthrough
Drawing 00002200 2" RF/DC with tilt mechanism, rotating shutter with 1"
baseplate feedthrough & variable position 3/4" OD tube compression fitting
8" OD (DN 200) CF Flange Mounted Variable Position with Shutter
Drawing 00000931,
Rev. A 2" RF/DC on 8" OD CF Flange with tilt mechanism & variable position 3/4" OD tube compression fitting
4.5" OD CF Flange Mounted Variable Position with Tilt & Shutter
Drawing 00002602 2" RF/DC on
4.5" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting
6" OD (DN 160) CF Flange Mounted Variable Position with Tilt & Shutter
Drawing 00002850 2" RF/DC on 6" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting
8" OD (DN 200) CF Flange Mounted Variable Position with Tilt & Shutter
Drawing 00000947,
Rev. A 2" RF/DC on 8" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting
3" Internal Mount Polaris™ Sputtering Source and Complete Assemblies Basic Source
- KF-40 Mounting Flange
Drawing 00000278, Rev. C 3" with KF-40 bulkhead flange (English (inch) fasteners)
Drawing 00002093 3" with KF-40 bulkhead flange metric fasteners)
AutoCAD 2000i .dwg Drawing Block - 3" Internal Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Internal Bottom View (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Internal Top View (zipped file)
Basic Source - 3 3/8" CF Mounting Flange
Drawing 00002673 3" with 3 3/8" CF flange
Fixed Position 1" Baseplate RF/DC Feedthrough
Drawing 00000719 3" with KF-40 to 1" baseplate RF/DC feedthrough assembly
Fixed Position 1" Baseplate DC Feedthrough
Drawing 00000792 3" with KF-40 to 1" baseplate DC feedthrough assembly
Fixed Position Mounted on 10" Diameter CF Flange with
Shutter
Drawing 00003048 with RF/DC and Ferrofluid Rotary Feedthroughs
Variable Position - 1" RF/DC Baseplate Feedthrough
Drawing 00000791,
Rev. A 3" RF/DC with variable position 3/4" OD tube feedthrough assembly
Variable Position with Shutter - 1" RF/DC Baseplate Feedthroughs
for Adjustable Height & Rotary Feedthrough
Drawing 00002172 3" RF/DC with
shutter & variable position 3/4" OD tube feedthrough assembly
AutoCAD 2000i .dwg Drawing Block
- 3" Side View - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Top
View - Shutter Open (zipped file)
Variable Position with Shutter - RF/DC Adjustable
Height Feedthrough - 1.33" CF Rotary Feedthrough
Drawing 00002928 3" RF/DC with
shutter & variable position 3/4" OD tube feedthrough assembly
Variable Position & Tilt - 1" RF/DC Baseplate Feedthrough
Drawing 00002135 3" RF/DC
with tilt mechanism & variable position 3/4" OD tube compression fitting
AutoCAD 2000i .dwg Drawing Block
- 3" Side View 1 - DIN 7/16 Connector (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View 2 - DIN 7/16 Connector (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Top
View (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View 1 - HN Connector (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View 2 - HN Connector (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View - 30 Degree Tilt Angle - HN Connector (zipped file)
Variable Position, Tilt
& Shutter - 1" RF/DC Baseplate Feedthrough
Drawing 00002118 3" RF/DC with tilt mechanism, rotating shutter with 1"
baseplate feedthrough & variable position 3/4" OD tube compression fitting
AutoCAD 2000i .dwg Drawing Block
- 3" Side View 1 - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View 1 - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View 2 - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View 2 - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Top
View - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View 1 - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View 1 - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View 2 - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View 2 - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View - 30 Degree Tilt Angle - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View - 30 Degree Tilt Angle - HN Connector - Shutter Open (zipped file)
6" OD (DN 160) CF Flange Mounted Variable Position
Drawing 00002508 3" RF/DC
on 6" OD CF Flange with variable position 3/4" OD tube feedthrough assembly
8" OD (DN 200) CF Flange Mounted Variable Position
Drawing 00002907 3" RF/DC
on 8" OD CF Flange with variable position 3/4" OD tube feedthrough assembly
8" OD (DN 200) CF Flange Mounted Variable Position with Shutter
Drawing 00002158 3" RF/DC on 8" OD CF Flange
with shutter and variable position 3/4" OD tube compression fitting
AutoCAD 2000i .dwg Drawing Block
- 3" Side View - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Top
View - Shutter Open (zipped file)
8" OD (DN 200) CF Flange Mounted Variable Position with Tilt & Shutter
Drawing 00002157 3" RF/DC on 8" OD CF Flange with tilt mechanism, shutter & variable position 3/4" OD tube compression fitting
AutoCAD 2000i .dwg Drawing Block
- 3" Side View 1 - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View 1 - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View 2 - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View 2 - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View - 30 Degree Tilt Angle - DIN 7/16 Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block - 3" Top
View - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View 1 - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View 1 - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View 2 - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View 2 - HN Connector - Shutter Open (zipped file)
AutoCAD 2000i .dwg Drawing Block
- 3" Side View - 30 Degree Tilt Angle - HN Connector - Shutter Closed (zipped file)
AutoCAD 2000i .dwg Drawing Block -
3" Side View - 30 Degree Tilt Angle - HN Connector - Shutter Open (zipped file)
10" OD (DN 250) CF Flange Mounted Variable Position
Drawing 00002714 3" RF/DC
on 10" OD CF Flange with variable position 3/4" OD tube feedthrough assembly
EXTERNAL MOUNT CONFIGURATIONS
3" Externally Mounted Source on ISO 160 Mounting Flange
Drawing 00002879
3" Flange Mounted Source on ISO 160 Mounting Flange
Adaptors and Misc. Parts
Baseplate Adaptors
Drawing 00000581 Baseplate Adaptor, 32.5mm to 1"
Legacy Drawings - No Longer Sold Drawing 00000197A.pdf 2" Polaris™ Basic Internal Mount Sputter Source with KF-40 Flange Drawing 0000049A.pdf 2" Internal Polaris™ with 1" RF/DC Baseplate Feedthrough Drawing 0000056A.pdf 2" Internal Polaris™ with 1" DC Baseplate Feedthrough | 
