Interface Control Drawings
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2" Internal Mount Polaris™
Sputtering Source and Complete Assemblies
Basic Source
Drawing 00000773 2" with KF-40 bulkhead flange
Fixed Position 1" Baseplate RF/DC Feedthrough
Drawing 00000784 2" with KF-40 to 1" baseplate RF/DC feedthrough assembly
Fixed Position 1" Baseplate DC Feedthrough
Drawing 00000786 2" with KF-40 to 1" baseplate DC feedthrough assembly
Variable Position - 1" RF/DC Baseplate Feedthrough
Drawing 00000785 2" RF/DC with variable position 3/4" OD tube feedthrough
assembly
Variable Position - Right Angle Head - 2.75" OD
CF Mounting Flange
Drawing 00000336 2" RF/DC right angle head with variable position 3/4" OD tube feedthrough
assembly
Variable Position & Tilt - 1" RF/DC Baseplate
Feedthrough
Drawing 00000928 2" RF/DC with tilt mechanism & variable position 3/4"
OD tube feedthrough assembly
Flange Mounted Variable Position with Shutter
Drawing 00000931 2" RF/DC on 8" OD CF Flange with tilt mechanism &
variable position 3/4" OD tube compression fitting
Flange Mounted Variable Position with Tilt & Shutter
Drawing 00000947 2" RF/DC on 8" OD CF Flange with tilt mechanism, shutter
& variable position 3/4" OD tube compression fitting
3" Internal Mount Polaris™
Sputtering Source and Complete Assemblies
Basic Source
Drawing 00000278, Rev. B 2" with KF-40 bulkhead flange
Fixed Position 1" Baseplate RF/DC Feedthrough
Drawing 00000719 2" with KF-40 to 1" baseplate RF/DC feedthrough assembly
Fixed Position 1" Baseplate DC Feedthrough
Drawing 00000792 2" with KF-40 to 1" baseplate DC feedthrough assembly
Variable Position - 1" RF/DC Baseplate Feedthrough
Drawing 00000791 2" RF/DC with variable position 3/4" OD tube feedthrough
assembly
Variable Position & Tilt - 1" RF/DC Baseplate
Feedthrough
Drawing 00000929 2" RF/DC with tilt mechanism & variable position 3/4"
OD tube feedthrough assembly
Flange Mounted Variable Position with Shutter
Drawing 00000938 2" RF/DC on 8" OD CF Flange with tilt mechanism &
variable position 3/4" OD tube compression fitting
Flange Mounted Variable Position with Tilt & Shutter
Drawing 00000943 2" RF/DC on 8" OD CF Flange with tilt mechanism, shutter
& variable position 3/4" OD tube compression fitting
Legacy Drawings - No Longer Sold
Drawing 00000197A.pdf 2"
Polaris™ Basic Internal Mount Sputter Source with KF-40 Flange
Drawing 0000049A.pdf 2"
Internal Polaris™ with 1" RF/DC Baseplate Feedthrough
Drawing 0000056A.pdf 2"
Internal Polaris™ with 1" DC Baseplate Feedthrough
