Sputtering Sources, Sputtering Packages, Spare Parts & Accessories
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SCOPE OF DELIVERY - POLARIS™ GEN II SOURCES
- Gas through the cathode body standard
- One .060" thick C110 copper (2") or 304 CRES (3") target backing plate
- One target clamping ring (type must be specified when ordering)
- One each 36” long 1/8" O.D. argon gas line and Swagelok union
- 304 CRES KF-40 bulkhead clamp set and centering ring
- Additional hardware as noted
- Documentation set on CD including: instruction manual, interface control drawing, assembly drawing, target, backing plate and target bonding specifications and drawings
| SIZE | PART NUMBER/DRAWING | DESCRIPTION | SALES BROCHURE |
| Click Here for Photo | Basic Sputtering Source | ||
| 2" | 00000778-1 | 2” Internal Mount Sputtering Source with bulkhead KF-40 Flange and target clamping ring for 0.125" or 0.188" thick clamped targets. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00000778-2 | 2” Internal Mount Sputtering Source with bulkhead KF-40 Flange and target clamping ring for 0.25" thick directly water-cooled targets. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00000778-3-125 | 2” Internal Mount Sputtering Source with bulkhead KF-40 Flange and target clamping ring for 0.125" thick bonded targets. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00000778-3-188 | 2” Internal Mount Cathode with bulkhead KF-40 Flange & target clamping ring for 0.188" thick bonded targets. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Fixed Position 1" Baseplate RF/DC Feedthrough | |||
| 2" | 00000784 | 2" Internal Mount with KF-40 to 1" baseplate RF/DC feedthrough assembly. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Fixed Position 1" Baseplate DC Feedthrough | |||
| 2" | 00000786 | 2" Internal Mount with KF-40 to 1" baseplate DC feedthrough assembly. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Click Here for Photo | Fixed Position 1" Baseplate RF/DC Feedthrough with Shutter | ||
| 00002244 | 2"
Internal Mount with KF-40 to 1" baseplate RF/DC feedthrough assembly.
Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough.. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 | |
| Click Here for Photo | Variable Position - 1" Baseplate Feedthrough | ||
| 2" | 00000785-1 | 2" Internal Mount RF/DC with variable position 3/4" OD x 12" long tube. Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00000785-2 | 2" Internal Mount RF/DC with variable position 3/4" OD x 18" long tube. Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00000785-3 | 2" Internal Mount RF/DC with variable position 3/4" OD x 24" long tube. Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Variable Position - 2.75" OD CF Flange Feedthrough | |||
| 00002510-1 | 2" Internal Mount RF/DC with variable position 3/4" OD x 12" long tube. Includes 2.75" OD feedthrough flange. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 | |
| 00002510-2 | 2"
Internal Mount RF/DC with variable position 3/4" OD x 18" long tube. Includes 2.75" OD feedthrough flange. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 | |
| 00002510-3 | 2"
Internal Mount RF/DC with variable position 3/4" OD x 24" long tube. Includes 2.75" OD feedthrough flange. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 | |
| Variable Position with Shutter - 1" Baseplate Feedthrough | |||
| 2" | 00002173-1 | 2"
Internal Mount RF/DC with variable position 3/4" OD x 12" long tube. Includes 1" baseplate feedthrough. Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00002173-2 | 2"
Internal Mount RF/DC with variable position 3/4" OD x 18" long tube. Includes 1" baseplate feedthrough. Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough.Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00002173-3 | 2"
Internal Mount RF/DC with variable position 3/4" OD x 24" long tube. Includes 1" baseplate feedthrough. Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough.Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Variable Position & Tilt - 1" Baseplate Feedthrough | |||
| 2" | 00000928-1 | 2" Internal Mount RF/DC with variable position 3/4" OD x 12" long tube and 30° from center tilt mechanism (60° included angle). Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00000928-2 | 2" Internal Mount RF/DC with variable position 3/4" OD x 18" long tube and 30° from center tilt mechanism (60° included angle). Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00000928-3 | 2" Internal Mount RF/DC with variable position 3/4" OD x 24" long tube and 30° from center tilt mechanism (60° included angle). Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Click Here for Photo | Variable Position with Tilt & Shutter - 1" Baseplate Feedthrough | ||
| 2" | 00002200-1 | 2" Internal Mount RF/DC mounted with 3/4" OD tube compression fitting. Variable position 3/4" OD x 12" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00002200-2 | 2" Internal Mount RF/DC mounted with 3/4" OD tube compression fitting. Variable position 3/4" OD x 18" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00002200-3 | 2" Internal Mount RF/DC mounted with 3/4" OD tube compression fitting. Variable position 3/4" OD x 24" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 6" OD CF Flange Mounted Variable Position and Tilt | |||
| 2" | 00002001-1 | 2" Internal Mount RF/DC mounted on
6" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 12" long tube. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00002001-2 | 2"
Internal Mount RF/DC mounted on 6" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 18" long tube. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00002001-3 | 2"
Internal Mount RF/DC mounted on 6" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 24" long tube. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 8" OD CF Flange Mounted Variable Position With Shutter | |||
| 2" | 00000931-1 | 2" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 12" long tube. Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00000931-2 | 2" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 18" long tube. Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00000931-3 | 2" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 24" long tube. Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Click Here for Photo | 8" OD CF Flange Mounted Variable Position and Tilt With Shutter | ||
| 2" | 00000947-1 | 2" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 12" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00000947-2 | 2" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 18" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 2" | 00000947-3 | 2" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 24" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Click Here for Photo | Basic Sputtering Source | ||
| 3" | 00000697-1 | 3” Internal Mount Cathode with bulkhead KF-40 Flange & target clamping ring for 0.125" or 0.188" thick clamped targets. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00000697-2 | 3” Internal Mount Cathode with bulkhead KF-40 Flange & target clamping ring for 0.25" thick directly water-cooled targets. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00000697-3-125 | 3” Internal Mount Cathode with bulkhead KF-40 Flange & target clamping ring for 0.125" thick bonded targets. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00000697-3-188 | 3” Internal Mount Cathode with bulkhead KF-40 Flange & target clamping ring for 0.188" thick bonded targets. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Fixed Position 1" Baseplate RF/DC Feedthrough | MC 600 02/08 451002 02/08 451003B 06/10 | ||
| 3" | 00000719 | 3" Internal Mount with KF-40 to 1" baseplate RF/DC feedthrough assembly. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Fixed Position 1" Baseplate DC Feedthrough | |||
| 3" | 00000792 | 3" Internal Mount with KF-40 to 1" baseplate DC feedthrough assembly. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Click Here for Photo | Variable Position - 1" Baseplate Feedthrough | MC 600 02/08 451002 02/08 | |
| 3" | 00000791-1 | 3" Internal Mount RF/DC with variable position 3/4" OD x 12" long tube. Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00000791-2 | 3" Internal Mount RF/DC with variable position 3/4" OD x 18" long tube. Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00000791-3 | 3" Internal Mount RF/DC with variable position 3/4" OD x 24" long tube. Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Variable Position & Tilt - 1" Baseplate Feedthrough | |||
| 3" | 00002135-1 | 3" Internal Mount RF/DC with variable position 3/4" OD x 12" long tube and 30° from center tilt mechanism (60° included angle). Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00002135-2 | 3" Internal Mount RF/DC with variable position 3/4" OD x 18" long tube and 30° from center tilt mechanism (60° included angle). Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00002135-3 | 3" Internal Mount RF/DC with variable position 3/4" OD x 24" long tube and 30° from center tilt mechanism (60° included angle). Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Click Here for Photo | Variable Position with Tilt & Shutter - 1" Baseplate Feedthrough | ||
| 3" | 00002118-1 | 3" Internal Mount RF/DC mounted with 3/4" OD tube compression fitting. Variable position 3/4" OD x 12" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00002118-2 | 3" Internal Mount RF/DC mounted with 3/4" OD tube compression fitting. Variable position 3/4" OD x 18" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00002118-3 | 3" Internal Mount RF/DC mounted with 3/4" OD tube compression fitting. Variable position 3/4" OD x 24" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 6" OD CF Flange Mounted Variable Position | |||
| 3" | 00002508-1 | 3" Internal Mount RF/DC mounted on
6" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 12" long tube. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00002508-2 |
3" Internal Mount RF/DC mounted on 6" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 18" long tube. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00002508-3 |
3" Internal Mount RF/DC mounted on 6" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 24" long tube. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 8" OD CF Flange Mounted Variable Position With Shutter | |||
| 3" | 00002158-1 |
3" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 12" long tube. Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00002158-2 |
3" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 18" long tube. Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00002158-3 |
3" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 24" long tube. Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Click Here for Photo | 8" OD CF Flange Mounted Variable Position and Tilt With Shutter | ||
| 3" | 00002157-1 | 3" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 12" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00002157-2 | 3" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 18" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| 3" | 00002157-3 | 3" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube compression fitting. Variable position 3/4" OD x 24" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter with 1" baseplate ferrofluidic rotary feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. | MC 600 02/08 451002 02/08 451003B 06/10 |
| Options for 2" & 3" Polaris Sputtering Sources | |||
| 00002514 | Substitute 2.75" OD CF flange with 3/4" compression fitting for 1" baseplate feedthrough. | - | |
| 00000451 | Substitute 6" OD CF flange with 3/4" compression fitting for 1" baseplate feedthrough (2" sources only). | - | |
| - | Add pneumatic cylinder with solenoid control valve to manual shutter feedthrough. | - | |
| - | Replace swing-type shutter with flip-up type shutter. | - | |
| - | Replace 1" baseplate feedthrough with 8" OD CF flange with 3/4" OD compression fitting. | - | |
| - | Eliminate variable positioning on flange mount assemblies with tilt capability and/or shutters. Specify face of target to inside surface of flange. | - | |
| - | Custom array of sources, shutters and other accessories mounted on single flange. | - | |
| Click on Links Below for Photo | Power Cables | Click on Links Below for Drawing/Sales Brochure | |
| 00000102-3 | 36" Long RG-393 RF Power Cable Assembly, Male HN Connector Both Ends | 00000102-3 | |
| 00000102-4 | 48" Long RG-393 RF Power Cable Assembly, Male HN Connector Both Ends | 00000102-4 | |
| 00000102-5 | 60" Long RG-393 RF Power Cable Assembly, Male HN Connector Both Ends | 00000102-5 | |
| 00000102-6 | 72" Long RG-393 RF Power Cable Assembly, Male HN Connector Both Ends | 00000102-6 | |
| 00002115 | 10' long RG-8/U DC Power Cable Assembly, Male HN Connector to Male UHF (SO239) Connector (For Ion™ 1500) | 00002115-1 | |
| Target Backing Plates | |||
| 2" | 0.060” thick copper backing plate - 6 hole legacy style | 00000772 - 451003B 06/10 | |
| 3" | 0.060” thick copper backing plate - 6 hole legacy style | 00000711 - 451003B 06/10 | |
| 3" | 00002091 | 0.060" thick backing plate - 304 stainless steel - GEN II | 451003B 06/10 |
| Target Clamping Rings | |||
| 2" | 00000775-1 | 0.125” thick bonded targets | - |
| 2" | 00000775-2 | 0.188” thick bonded targets | - |
| 2" | 00000771 | 0.125 - 0.188" thick clamped targets | - |
| 2" | 00000779 | 0.250” thick directly water cooled targets | - |
| 3" | 00000763-1 | 0.125” thick bonded targets | - |
| 3" | 00000763-2 | 0.188” thick bonded targets | - |
| 3" | 00000571 | 0.125 - 0.188" thick clamped targets | - |
| 3" | 00000762 | 0.250” thick directly water cooled targets | - |
| Vacuum Hardware | |||
| 00000018 | DC Feedthrough Assembly, KF-40/1" Baseplate | 00000018 | |
| 00000016 | Bulkhead KF-40 Clamp Set, 304 CRES | - | |
| 00002153-1 | KF-40 Clamping Ring with Adaptive Coating on threaded stud | - | |
| 00000581 | Baseplate Adaptor, 32,4mm to 1" (typical for Leybold & Balzers systems) | 00000581 | |
| 00000446 | 1 Inch Baseplate Feedthrough with compression fitting for 3/4" OD feedthrough tube | 00000446 | |
| 00000100-3 | KF-40 Centering Ring with Viton O-Ring | - | |
| Magnet Module | - | ||
| 2" | 00000782 | Magnet Module | - |
| 3 | 00000573 | Magnet Module | - |
SCOPE OF DELIVERY -
POLARIS™ GEN II SERIES RF SPUTTERING PACKAGES
- Polaris™ GEN II Internal Mount Sputtering Source, as defined above
- 300 watt13.56 MHz RF Power Generation System with either automatic or manual impedance matching network or,
- 600 watt 13.56 MHz RF Power Generation System with automatic impedance matching network
- 36" long RG-393 Output Cable
- All necessary interconnect cables
- Documentation set on CD including: instruction manuals for source and power generation system, interface control drawing, assembly drawing, target, backing plate and target bonding specifications and drawings
NOTE:
Add "-A" to Part Number for Automatic Impedance Matching Network
Add "-M" to Part Number for Manual Impedance Matching Network
(Not available for 600 watt packages)
| SIZE | POWER | PART NUMBER | DESCRIPTION | SALES BROCHURE |
| Fixed Position 1" Baseplate RF/DC Feedthrough | ||||
| 2" | 300 watts | 00000766 | Polaris™ GEN II Series 300 Package with P/N 00000784 Source | |
| 2" | 600 watts | 00002523 | Polaris™ GEN II Series 600 Package with P/N 00000784 Source | |
| Click Here for Source Photo | Fixed Position 1" Baseplate RF/DC Feedthrough With Shutter | |||
| 2" | 300 watts | 00002246 | Polaris™ GEN II Series 300 Package with P/N 00002244 Source | |
| 2" | 600 watts | 00002524 | Polaris™ GEN II Series 600 Package with P/N 00002244 Source | |
| Click Here for Source Photo | Variable Position - 1" Baseplate Feedthrough | |||
| 2" | 300 watts | 00000951-1 | Polaris™ GEN II Series 300 Package with P/N 00000785-1 Source | |
| 2" | 600 watts | 00002525-1 | Polaris™ GEN II Series 600 Package with P/N 00000785-1 Source | |
| 2" | 300 watts | 00000951-2 | Polaris™ GEN II Series 300 Package with P/N 00000785-2 Source | |
| 2" | 600 watts | 00002525-2 | Polaris™ GEN II Series 600 Package with P/N 00000785-2 Source | |
| 2" | 300 watts | 00000951-3 | Polaris™ GEN II Series 300 Package with P/N 00000785-3 Source | |
| 2" | 600 watts | 00002525-3 | Polaris™ GEN II Series 600 Package with P/N 00000785-3 Source | |
| Variable Position - 2.75" OD CF Flange | ||||
| 2" | 300 watts | 00002511-1 | Polaris™ GEN II Series 300 Package with P/N 00002510-1 Source | |
| 2" | 600 watts | 00002526-1 | Polaris™ GEN II Series 600 Package with P/N 00002510-1 Source | |
| 2" | 300 watts | 00002511-2 | Polaris™ GEN II Series 300 Package with P/N 00002510-2 Source | |
| 2" | 600 watts | 00002526-2 | Polaris™ GEN II Series 600 Package with P/N 00002510-2 Source | |
| 2" | 300 watts | 00002511-3 | Polaris™ GEN II Series 300 Package with P/N 00002510-3 Source | |
| 2" | 600 watts | 00002526-3 | Polaris™ GEN II Series 600 Package with P/N 00002510-3 Source | |
| Variable Position with Shutter - 1" Baseplate Feedthrough | ||||
| 2" | 300 watts | 00002175-1 | Polaris™ GEN II Series 300 Package with P/N 00002173-1 Source | |
| 2" | 600 watts | 00002527-1 | Polaris™ GEN II Series 600 Package with P/N 00002173-1 Source | |
| 2" | 300 watts | 00002175-2 | Polaris™ GEN II Series 300 Package with P/N 00002173-2 Source | |
| 2" | 600 watts | 00002527-2 | Polaris™ GEN II Series 600 Package with P/N 00002173-2 Source | |
| 2" | 300 watts | 00002175-3 | Polaris™ GEN II Series 300 Package with P/N 00002173-3 Source | |
| 2" | 600 watts | 00002527-3 | Polaris™ GEN II Series 600 Package with P/N 00002173-3 Source | |
| Variable Position & Tilt - 1" Baseplate Feedthrough | ||||
| 2" | 300 watts | 00000952-1 | Polaris™ GEN II Series 300 Package with P/N 00000928-1 Source | |
| 2" | 600 watts | 00002528-1 | Polaris™ GEN II Series 600 Package with P/N 00000928-1 Source | |
| 2" | 300 watts | 00000952-2 | Polaris™ GEN II Series 300 Package with P/N 00000928-2 Source | |
| 2" | 600 watts | 00002528-2 | Polaris™ GEN II Series 600 Package with P/N 00000928-2 Source | |
| 2" | 300 watts | 00000952-3 | Polaris™ GEN II Series 300 Package with P/N 00000928-3 Source | |
| 2" | 600 watts | 00002528-3 | Polaris™ GEN II Series 600 Package with P/N 00000928-3 Source | |
| Click Here for Source Photo | Variable Position, Tilt & Shutter - 1" Baseplate Feedthrough | |||
| 2" | 300 watts | 00002176-1 | Polaris™ GEN II Series 300 Package with P/N 00002174-1 Source (ICD 00002200) | |
| 2" | 600 watts | 00002529-1 | Polaris™ GEN II Series 600 Package with P/N 00002174-1 Source (ICD 00002200) | |
| 2" | 300 watts | 00002176-2 | Polaris™ GEN II Series 300 Package with P/N 00002200-2 Source | |
| 2" | 600 watts | 00002529-2 | Polaris™ GEN II Series 600 Package with P/N 00002174-2 Source (ICD 00002200) | |
| 2" | 300 watts | 00002176-3 | Polaris™ GEN II Series 300 Package with P/N 00002200-3 Source | |
| 2" | 600 watts | 00002529-3 | Polaris™ GEN II Series 600 Package with P/N 00002174-3 Source (ICD 00002200) | |
| 6" OD CF Flange Mounted Variable Position and Tilt | ||||
| 2" | 300 watts | 00002541-1 | Polaris™ GEN II Series 300 Package with P/N 00002001-1 Source | |
| 2" | 600 watts | 00002542-1 | Polaris™ GEN II Series 600 Package with P/N 00002001-1 Source | |
| 2" | 300 watts | 00002541-2 | Polaris™ GEN II Series 300 Package with P/N 00002001-2 Source | |
| 2" | 600 watts | 00002542-2 | Polaris™ GEN II Series 600 Package with P/N 00002001-2 Source | |
| 2" | 300 watts | 00002541-3 | Polaris™ GEN II Series 300 Package with P/N 00002001-3 Source | |
| 2" | 600 watts | 00002542-3 | Polaris™ GEN II Series 600 Package with P/N 00002001-3 Source | |
| 8" OD CF Flange Mounted Variable Position With Shutter | ||||
| 2" | 300 watts | 00000953-1 | Polaris™ GEN II Series 300 Package with P/N 00000931-1 Source | |
| 2" | 600 watts | 00002530-1 | Polaris™ GEN II Series 600 Package with P/N 00000931-1 Source | |
| 2" | 300 watts | 00000953-2 | Polaris™ GEN II Series 300 Package with P/N 00000931-2 Source | |
| 2" | 600 watts | 00002530-2 | Polaris™ GEN II Series 600 Package with P/N 00000931-2 Source | |
| 2" | 300 watts | 00000953-3 | Polaris™ GEN II Series 300 Package with P/N 00000931-3 Source | |
| 2" | 600 watts | 00002530-3 | Polaris™ GEN II Series 600 Package with P/N 00000931-3 Source | |
| Click Here for Source Photo | 8" OD CF Flange Mounted Variable Position and Tilt With Shutter | |||
| 2" | 300 watts | 00000954-1 | Polaris™ GEN II Series 300 Package with P/N 00000947-1 Source | |
| 2" | 600 watts | 00002531-1 | Polaris™ GEN II Series 600 Package with P/N 00000947-1 Source | |
| 2" | 300 watts | 00000954-2 | Polaris™ GEN II Series 300 Package with P/N 00000947-2 Source | |
| 2" | 600 watts | 00002531-2 | Polaris™ GEN II Series 600 Package with P/N 00000947-2 Source | |
| 2" | 300 watts | 00000954-3 | Polaris™ GEN II Series 300 Package with P/N 00000947-3 Source | |
| 2" | 600 watts | 00002531-3 | Polaris™ GEN II Series 600 Package with P/N 00000947-3 Source | |
| Fixed Position 1" Baseplate RF/DC Feedthrough | ||||
| 3" | 300 watts | 00000767 | Polaris™ GEN II Series 300 Package with P/N 00000719 Source | |
| 3" | 600 watts | 00002535 | Polaris™ GEN II Series 600 Package with P/N 00000719 Source | |
| Click Here for Source Photo | Variable Position - 1" Baseplate Feedthrough | |||
| 3" | 300 watts | 00000956-1 | Polaris™ GEN II Series 300 Package with P/N 00000791-1 Source | |
| 3" | 600 watts | 00002536-1 | Polaris™ GEN II Series 600 Package with P/N 00000791-1 Source | |
| 3" | 300 watts | 00000956-2 | Polaris™ GEN II Series 300 Package with P/N 00000791-2 Source | |
| 3" | 600 watts | 00002536-2 | Polaris™ GEN II Series 600 Package with P/N 00000791-2 Source | |
| 3" | 300 watts | 00000956-3 | Polaris™ GEN II Series 300 Package with P/N 00000791-3 Source | |
| 3" | 600 watts | 00002536-3 | Polaris™ GEN II Series 600 Package with P/N 00000791-3 Source | |
| Variable Position with Shutter - 1" Baseplate Feedthrough | ||||
| 3" | 300 watts | 00002177-1 | Polaris™ GEN II Series 300 Package with P/N 00002172-1 Source | |
| 3" | 600 watts | 00002537-1 | Polaris™ GEN II Series 600 Package with P/N 00002172-1 Source | |
| 3" | 300 watts | 00002177-2 | Polaris™ GEN II Series 300 Package with P/N 00002172-2 Source | |
| 3" | 600 watts | 00002537-2 | Polaris™ GEN II Series 600 Package with P/N 00002172-2 Source | |
| 3" | 300 watts | 00002177-3 | Polaris™ GEN II Series 300 Package with P/N 00002172-3 Source | |
| 3" | 600 watts | 00002537-3 | Polaris™ GEN II Series 600 Package with P/N 00002172-3 Source | |
| Variable Position & Tilt - 1" Baseplate Feedthrough | ||||
| 3" | 300 watts | 00000957-1 | Polaris™ GEN II Series 300 Package with P/N 00002135-1 Source | |
| 3" | 600 watts | 00002538-1 | Polaris™ GEN II Series 600 Package with P/N 00002135-1 Source | |
| 3" | 300 watts | 00000957-2 | Polaris™ GEN II Series 300 Package with P/N 00002135-2 Source | |
| 3" | 600 watts | 00002538-2 | Polaris™ GEN II Series 600 Package with P/N 00002135-2 Source | |
| 3" | 300 watts | 00000957-3 | Polaris™ GEN II Series 300 Package with P/N 00002135-3 Source | |
| 3" | 600 watts | 00002538-3 | Polaris™ GEN II Series 600 Package with P/N 00002135-3 Source | |
| Click Here for Source Photo | Variable Position with Tilt and Shutter - 1" Baseplate Feedthrough | |||
| 3" | 300 watts | 00002178-1 | Polaris™ GEN II Series 300 Package with P/N 00002118-1 Source | |
| 3" | 600 watts | 00002532-1 | Polaris™ GEN II Series 600 Package with P/N 00002118-1 Source | |
| 3" | 300 watts | 00002178-2 | Polaris™ GEN II Series 300 Package with P/N 00002118-2 Source | |
| 3" | 600 watts | 00002532-2 | Polaris™ GEN II Series 600 Package with P/N 00002118-2 Source | |
| 3" | 300 watts | 00002178-3 | Polaris™ GEN II Series 300 Package with P/N 00002118-3 Source | |
| 3" | 600 watts | 00002532-3 | Polaris™ GEN II Series 600 Package with P/N 00002118-3 Source | |
| 6" OD CF Flange Mounted Variable Position | ||||
| 3" | 300 watts | 00002539-1 | Polaris™ GEN II Series 300 Package with P/N 00002508-1 Source | |
| 3" | 600 watts | 00002540-1 | Polaris™ GEN II Series 600 Package with P/N 00002508-1 Source | |
| 3" | 300 watts | 00002539-2 | Polaris™ GEN II Series 300 Package with P/N 00002508-2 Source | |
| 3" | 600 watts | 00002540-2 | Polaris™ GEN II Series 600 Package with P/N 00002508-2 Source | |
| 3" | 300 watts | 00002539-3 | Polaris™ GEN II Series 300 Package with P/N 00002508-3 Source | |
| 3" | 600 watts | 00002540-3 | Polaris™ GEN II Series 600 Package with P/N 00002508-3 Source | |
| 8" OD CF Flange Mounted Variable Position With Shutter | ||||
| 3" | 300 watts | 00000958-1 | Polaris™ GEN II Series 300 Package with P/N 00002158-1 Source | |
| 3" | 600 watts | 00002533-1 | Polaris™ GEN II Series 600 Package with P/N 00002158-1 Source | |
| 3" | 300 watts | 00000958-2 | Polaris™ GEN II Series 300 Package with P/N 00002158-2 Source | |
| 3" | 600 watts | 00002533-2 | Polaris™ GEN II Series 600 Package with P/N 00002158-2 Source | |
| 3" | 300 watts | 00000958-3 | Polaris™ GEN II Series 300 Package with P/N 00002158-3 Source | |
| 3" | 600 watts | 00002533-3 | Polaris™ GEN II Series 600 Package with P/N 00002158-3 Source | |
| Click Here for Source Photo | Flange Mounted Variable Position and Tilt With Shutter | |||
| 3" | 300 watts | 00000959-1 | Polaris™ GEN II Series 300 Package with P/N 00002157-1 Source | |
| 3" | 600 watts | 00002534-1 | Polaris™ GEN II Series 600 Package with P/N 00002157-1 Source | |
| 3" | 300 watts | 00000959-2 | Polaris™ GEN II Series 300 Package with P/N 00002157-2 Source | |
| 3" | 600 watts | 00002534-2 | Polaris™ GEN II Series 600 Package with P/N 00002157-2 Source | |
| 3" | 300 watts | 00000959-3 | Polaris™ GEN II Series 300 Package with P/N 00002157-3 Source | |
| 3" | 600 watts | 00002534-3 | Polaris™ GEN II Series 600 Package with P/N 00002157-3 Source |
SCOPE OF DELIVERY -
POLARIS™ GEN II DC SPUTTERING PACKAGES
- Polaris™ GEN II Internal Mount Sputtering Source, as defined above
- 1500 watt Ion™ DC Magnetron Sputtering Power Supply
- 8' long RG-8/U Power Output Cable
- All necessary electrical, gas, rotary motion and vacuum hardware
- Documentation set on CD including: instruction manuals for source and power supply, interface control drawing, assembly drawing, target, backing plate and target bonding specifications and drawings
| SIZE | PART NUMBER | DESCRIPTION | SALES BROCHURE |
| Fixed Position 1" Baseplate RF/DC Feedthrough | |||
| 2" | 00002179 | Polaris™ GEN II Series 300 Package with P/N 00000784 Source | |
| Click Here for Source Photo | Fixed Position 1" Baseplate RF/DC Feedthrough With Shutter | ||
| 2" | 00002436 | Polaris™ GEN II Series 300 Package with P/N 00002244 Source | |
| Click Here for Source Photo | Variable Position - 1" Baseplate Feedthrough | ||
| 2" | 00002180-1 | Polaris™ GEN II Series 300 Package with P/N 00000785-1 Source | |
| 2" | 00002180-2 | Polaris™ GEN II Series 300 Package with P/N 00000785-2 Source | |
| 2" | 00002180-3 | Polaris™ GEN II Series 300 Package with P/N 00000785-3 Source | |
| Variable Position with Shutter - 1" Baseplate Feedthrough | |||
| 2" | 00002181-1 | Polaris™ GEN II Series 300 Package with P/N 00002173-1 Source | |
| 2" | 00002181-2 | Polaris™ GEN II Series 300 Package with P/N 00002173-1 Source | |
| 2" | 00002181-3 | Polaris™ GEN II Series 300 Package with P/N 00002173-1 Source | |
| Variable Position & Tilt - 1" Baseplate Feedthrough | |||
| 2" | 00002182-1 | Polaris™ GEN II Series 300 Package with P/N 00000928-1 Source | |
| 2" | 00002182-2 | Polaris™ GEN II Series 300 Package with P/N 00000928-2 Source | |
| 2" | 00002182-3 | Polaris™ GEN II Series 300 Package with P/N 00000928-3 Source | |
| Click Here for Source Photo | Variable Position, Tilt & Shutter - 1" Baseplate Feedthrough | ||
| 2" | 00002183-1 | Polaris™ GEN II Series 300 Package with P/N 00002200-1 Source | |
| 2" | 00002183-2 | Polaris™ GEN II Series 300 Package with P/N 00002200-1 Source | |
| 2" | 00002183-3 | Polaris™ GEN II Series 300 Package with P/N 00002200-1 Source | |
| 8" OD CF Flange Mounted Variable Position With Shutter | |||
| 2" | 00002184-1 | Polaris™ GEN II Series 300 Package with P/N 00000931-1 Source | |
| 2" | 00002184-2 | Polaris™ GEN II Series 300 Package with P/N 00000931-2 Source | |
| 2" | 00002184-3 | Polaris™ GEN II Series 300 Package with P/N 00000931-3 Source | |
| Click Here for Source Photo | 8" OD CF Flange Mounted Variable Position and Tilt With Shutter | ||
| 2" | 00002185-1 | Polaris™ GEN II Series 300 Package with P/N 00000947-1 Source | |
| 2" | 00002185-2 | Polaris™ GEN II Series 300 Package with P/N 00000947-2 Source | |
| 2" | 00002185-3 | Polaris™ GEN II Series 300 Package with P/N 00000947-3 Source | |
| Fixed Position 1" Baseplate RF/DC Feedthrough | |||
| 3' | 00002186 | Polaris™ GEN II Series 300 Package with P/N 00000719 Source | |
| Click Here for Source Photo | Variable Position - 1" Baseplate Feedthrough | ||
| 3" | 00002187-1 | Polaris™ GEN II Series 300 Package with P/N 00000791-1 Source | |
| 3" | 00002187-2 | Polaris™ GEN II Series 300 Package with P/N 00000791-2 Source | |
| 3" | 00002187-3 | Polaris™ GEN II Series 300 Package with P/N 00000791-3 Source | |
| Variable Position with Shutter - 1" Baseplate Feedthrough | |||
| 3" | 00002188-1 | Polaris™ GEN II Series 300 Package with P/N 00002172-1 Source | |
| 3" | 00002188-2 | Polaris™ GEN II Series 300 Package with P/N 00002172-1 Source | |
| 3" | 00002188-3 | Polaris™ GEN II Series 300 Package with P/N 00002172-1 Source | |
| Variable Position & Tilt - 1" Baseplate Feedthrough | |||
| 3" | 00002189-1 | Polaris™ GEN II Series 300 Package with P/N 00002135-1 Source | |
| 3" | 00002189-2 | Polaris™ GEN II Series 300 Package with P/N 00002135-2 Source | |
| 3" | 00002189-3 | Polaris™ GEN II Series 300 Package with P/N 00002135-3 Source | |
| Click Here for Source Photo | Variable Position with Tilt and Shutter - 1" Baseplate Feedthrough | ||
| 3" | 00002190-1 | Polaris™ GEN II Series 300 Package with P/N 00002118-1 Source | |
| 3" | 00002190-2 | Polaris™ GEN II Series 300 Package with P/N 00002118-1 Source | |
| 3" | 00002190-3 | Polaris™ GEN II Series 300 Package with P/N 00002118-1 Source | |
| 8" OD CF Flange Mounted Variable Position With Shutter | |||
| 3" | 00002191-1 | Polaris™ GEN II Series 300 Package with P/N 00002158-1 Source | |
| 3" | 00002191-2 | Polaris™ GEN II Series 300 Package with P/N 00002158-2 Source | |
| 3" | 00002191-3 | Polaris™ GEN II Series 300 Package with P/N 00002158-3 Source | |
| Click Here for Source Photo | 8" OD CF Flange Mounted Variable Position and Tilt With Shutter | ||
| 3" | 00002192-1 | Polaris™ GEN II Series 300 Package with P/N 00002157-1 Source | |
| 3" | 00002192-2 | Polaris™ GEN II Series 300 Package with P/N 00002157-2 Source | |
| 3" | 00002192-3 | Polaris™ GEN II Series 300 Package with P/N 00002157-3 Source |
