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 | Gas through the cathode body standard |
| One .060" thick C110 copper target backing plate |
| One target clamping ring (type must be specified when ordering) |
| One each 36” long 1/8" O.D. argon gas line and Swagelok union |
| 304 CRES KF-40 bulkhead clamp set and centering ring |
| Documentation set on CD including: instruction manual, interface control drawing, assembly drawing, target, backing plate and target bonding specifications and drawings, magnet module field profiles |
| SIZE | PART NUMBER | DESCRIPTION | SALES BROCHURE |
| Basic Sputtering Source | |||
| 2" | 00000778-1 | 2”
Internal Mount Sputtering Source with bulkhead KF-40 Flange and target clamping ring for 0.125" or 0.188" thick clamped targets. |
MC
600 02/08 451002 02/08 |
| 2" | 00000778-2 | 2”
Internal Mount Sputtering Source with bulkhead KF-40 Flange and target clamping ring for 0.25" thick directly water-cooled targets. |
MC
600 02/08 451002 02/08 |
| 2" | 00000778-3-125 | 2”
Internal Mount Sputtering Source with bulkhead KF-40 Flange and target clamping ring for 0.125" thick bonded targets. |
MC
600 02/08 451002 02/08 |
| 2" | 00000778-3-188 | 2”
Internal Mount Cathode with bulkhead KF-40 Flange & target clamping
ring for 0.188" thick bonded targets. |
MC
600 02/08 451002 02/08 |
| Fixed Position 1" Baseplate RF/DC Feedthrough | MC
600 02/08 451002 02/08 |
||
| 2" | 00000784 | 2"
Internal Mount with
KF-40 to 1" baseplate RF/DC feedthrough assembly. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| Fixed Position 1" Baseplate DC Feedthrough | |||
| 2" | 00000786 | 2"
Internal Mount with KF-40
to 1" baseplate DC feedthrough assembly. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| Variable Position - 1" Baseplate Feedthrough | MC
600 02/08 451002 02/08 |
||
| 2" | 00000785-1 | 2"
Internal Mount RF/DC with variable position 3/4" OD x 12" long
tube. Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 2" | 00000785-2 | 2"
Internal Mount RF/DC with variable position 3/4" OD x 18" long
tube. Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 2" | 00000785-3 | 2"
Internal Mount RF/DC with variable position 3/4" OD x 24" long
tube. Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| Variable Position & Tilt - 1" Baseplate Feedthrough | |||
| 2" | 00000928-1 | 2"
Internal Mount RF/DC with variable position 3/4" OD x 12" long
tube and 30° from center tilt mechanism (60° included angle). Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 2" | 00000928-2 | 2"
Internal Mount RF/DC with variable position 3/4" OD x 18" long
tube and 30° from center tilt mechanism (60° included angle). Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 2" | 00000928-3 | 2"
Internal Mount RF/DC with variable position 3/4" OD x 24" long
tube and 30° from center tilt mechanism (60° included angle). Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| Flange Mounted Variable Position With Shutter | |||
| 2" | 00000931-1 | 2"
Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD
tube compression fitting. Variable position 3/4" OD x 12" long tube. Includes manual swing shutter. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 2" | 00000931-2 | 2"
Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD
tube compression fitting. Variable position 3/4" OD x 18" long tube. Includes manual swing shutter. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 2" | 00000931-3 | 2"
Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD
tube compression fitting. Variable position 3/4" OD x 24" long tube. Includes manual swing shutter. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| Flange Mounted Variable Position and Tilt With Shutter | |||
| 2" | 00000947-1 | 2"
Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD
tube compression fitting. Variable position 3/4" OD x 12" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 2" | 00000947-2 | 2"
Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD
tube compression fitting. Variable position 3/4" OD x 18" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 2" | 00000947-3 | 2"
Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD
tube compression fitting. Variable position 3/4" OD x 24" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| Basic Sputtering Source | |||
| 3" | 00000697-1 |
3”
Internal Mount Cathode with bulkhead KF-40 Flange & target
clamping ring for 0.125" or 0.188" thick clamped targets. |
MC
600 02/08 451002 02/08 |
| 3" | 00000697-2 |
3”
Internal Mount Cathode with bulkhead KF-40 Flange & target
clamping ring for 0.25" thick directly water-cooled targets. |
MC
600 02/08 451002 02/08 |
| 3" | 00000697-3-125 |
3”
Internal Mount Cathode with bulkhead KF-40 Flange & target
clamping ring for 0.125" thick bonded targets. |
MC
600 02/08 451002 02/08 |
| 3" | 00000697-3-188 |
3”
Internal Mount Cathode with bulkhead KF-40 Flange & target clamping
ring for 0.188" thick bonded targets. |
MC
600 02/08 451002 02/08 |
| Fixed Position 1" Baseplate RF/DC Feedthrough | MC
600 02/08 451002 02/08 |
||
| 3" | 00000719 | 3"
Internal Mount with
KF-40 to 1" baseplate RF/DC feedthrough assembly. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| Fixed Position 1" Baseplate DC Feedthrough | |||
| 3" | 00000792 | 3"
Internal Mount with KF-40
to 1" baseplate DC feedthrough assembly. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| Variable Position - 1" Baseplate Feedthrough | MC
600 02/08 451002 02/08 |
||
| 3" | 00000791-1 | 3"
Internal Mount RF/DC with variable position 3/4" OD x 12" long
tube. Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 3" | 00000791-2 | 3"
Internal Mount RF/DC with variable position 3/4" OD x 18" long
tube. Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 3" | 00000791-3 | 3"
Internal Mount RF/DC with variable position 3/4" OD x 24" long
tube. Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| Variable Position & Tilt - 1" Baseplate Feedthrough | |||
| 3" | 00000929-1 | 3"
Internal Mount RF/DC with variable position 3/4" OD x 12" long
tube and 30° from center tilt mechanism (60° included angle). Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 3" | 00000929-2 | 3"
Internal Mount RF/DC with variable position 3/4" OD x 18" long
tube and 30° from center tilt mechanism (60° included angle). Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 3" | 00000929-3 | 3"
Internal Mount RF/DC with variable position 3/4" OD x 24" long
tube and 30° from center tilt mechanism (60° included angle). Includes 1" baseplate feedthrough. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| Flange Mounted Variable Position With Shutter | |||
| 3" | 00000938-1 | 3"
Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD
tube compression fitting. Variable position 3/4" OD x 12" long tube. Includes manual swing shutter. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 3" | 00000938-2 | 3"
Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD
tube compression fitting. Variable position 3/4" OD x 18" long tube. Includes manual swing shutter. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 3" | 00000938-3 | 3"
Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD
tube compression fitting. Variable position 3/4" OD x 24" long tube. Includes manual swing shutter. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| Flange Mounted Variable Position and Tilt With Shutter | |||
| 3" | 00000943-1 | 3"
Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD
tube compression fitting. Variable position 3/4" OD x 12" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 3" | 00000943-2 | 3"
Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD
tube compression fitting. Variable position 3/4" OD x 18" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| 3" | 00000943-3 | 3"
Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD
tube compression fitting. Variable position 3/4" OD x 24" long tube and 30° from center tilt mechanism (60° included angle). Includes manual swing shutter. Specify desired target arrangement noted for basic sputtering source when ordering. |
MC
600 02/08 451002 02/08 |
| Options for 2" & 3" Polaris Sputtering Sources | |||
| - | Substitute
2.75" OD CF flange with 3/4" compression fitting for 1"
baseplate feedthrough. |
- | |
| 00000451 | Substitute
6" OD CF flange with 3/4" compression fitting for 1"
baseplate feedthrough (2" sources only). |
- | |
| - | Add pneumatic cylinder with solenoid control valve to manual shutter feedthrough. | - | |
| - | Replace swing-type shutter with flip-up type shutter. | - | |
| - | Replace
1" baseplate feedthrough with 8" OD CF flange with 3/4" OD
compression fitting. |
- | |
| - | Eliminate
variable positioning on flange mount assemblies with tilt capability
and/or shutters. Specify face of target to inside surface of flange. |
- | |
| - | Custom
array of sources, shutters and other accessories mounted on single flange. |
- | |
| Power Cables | |||
| 00000102-3 | 36" Long RG-393 RF Power Cable Assembly, Male HN Connector Both Ends | - | |
| 00000102-4 | 48" Long RG-393 RF Power Cable Assembly, Male HN Connector Both Ends | - | |
| 00000102-5 | 60" Long RG-393 RF Power Cable Assembly, Male HN Connector Both Ends | - | |
| 00000102-6 | 72" Long RG-393 RF Power Cable Assembly, Male HN Connector Both Ends | - | |
| Target Backing Plates | |||
| 2" | 00000772 | 0.060” thick copper backing plate | - |
| 3" | 00000711 | 0.060” thick copper backing plate | - |
| Target Clamping Rings | |||
| 2" | 00000775-1 | 0.125” thick bonded targets | - |
| 2" | 00000775-2 | 0.188” thick bonded targets | - |
| 2" | 00000771 | 0.125 - 0.188" thick clamped targets | - |
| 2" | 00000779 | 0.250” thick directly water cooled targets | - |
| 3" | 00000763-1 | 0.125” thick bonded targets | - |
| 3" | 00000763-2 | 0.188” thick bonded targets | - |
| 3" | 00000571 | 0.125 - 0.188" thick clamped targets | - |
| 3" | 00000762 | 0.250” thick directly water cooled targets | - |
| Vacuum Hardware | |||
| 00000016 | Bulkhead KF-40 Clamp Set, 304 CRES | - | |
| 00000099 | KF-40 Clamping Ring | - | |
| 00000100-3 | KF-40 Centering Ring with Viton O-Ring | - | |
| Magnet Module | - | ||
| 2" | 00000782 | Magnet Module | - |
| 3 | 00000573 | Magnet Module | - |
SCOPE OF DELIVERY - POLARIS™ GEN II SERIES 300 RF SPUTTERING PACKAGES
| Polaris™ GEN II Internal Mount Sputtering Source, as defined above |
| 19" Rack Mount with 13.56 MHz Power Supply and Integrated Manual Matching Network |
| RG-393 Output Cable |
| Documentation set on CD including: instruction manuals for source and power generation system, interface control drawing, assembly drawing, target, backing plate and target bonding specifications and drawings, magnet module field profiles |
| SIZE | PART NUMBER | DESCRIPTION | SALES BROCHURE |
| Fixed Position 1" Baseplate RF/DC Feedthrough | |||
| 2" | 00000766 | Polaris™ GEN II Series 300 Package with P/N 00000784 Source | MC 402 02/08 |
| Variable Position - 1" Baseplate Feedthrough | |||
| 2" | 00000951-1 | Polaris™ GEN II Series 300 Package with P/N 00000785-1 Source | MC 402 02/08 |
| 2" | 00000951-2 | Polaris™ GEN II Series 300 Package with P/N 00000785-2 Source | MC 402 02/08 |
| 2" | 00000951-3 | Polaris™ GEN II Series 300 Package with P/N 00000785-3 Source | MC 402 02/08 |
| Variable Position & Tilt - 1" Baseplate Feedthrough | |||
| 2" | 00000952-1 | Polaris™ GEN II Series 300 Package with P/N 00000928-1 Source | MC 402 02/08 |
| 2" | 00000952-2 | Polaris™ GEN II Series 300 Package with P/N 00000928-2 Source | MC 402 02/08 |
| 2" | 00000952-3 | Polaris™ GEN II Series 300 Package with P/N 00000928-3 Source | MC 402 02/08 |
| Flange Mounted Variable Position With Shutter | |||
| 2" | 00000953-1 | Polaris™ GEN II Series 300 Package with P/N 00000931-1 Source | MC 402 02/08 |
| 2" | 00000953-2 | Polaris™ GEN II Series 300 Package with P/N 00000931-2 Source | MC 402 02/08 |
| 2" | 00000953-3 | Polaris™ GEN II Series 300 Package with P/N 00000931-3 Source | MC 402 02/08 |
| Flange Mounted Variable Position and Tilt With Shutter | |||
| 2" | 00000954-1 | Polaris™ GEN II Series 300 Package with P/N 00000947-1 Source | MC 402 02/08 |
| 2" | 00000954-2 | Polaris™ GEN II Series 300 Package with P/N 00000947-2 Source | MC 402 02/08 |
| 2" | 00000954-3 | Polaris™ GEN II Series 300 Package with P/N 00000947-3 Source | MC 402 02/08 |
| Fixed Position 1" Baseplate RF/DC Feedthrough | |||
| 3' | 00000767 | Polaris™ GEN II Series 300 Package with P/N 00000719 Source | MC 402 02/08 |
| Variable Position - 1" Baseplate Feedthrough | |||
| 3" | 00000956-1 | Polaris™ GEN II Series 300 Package with P/N 00000791-1 Source | MC 402 02/08 |
| 3" | 00000956-2 | Polaris™ GEN II Series 300 Package with P/N 00000791-2 Source | MC 402 02/08 |
| 3" | 00000956-3 | Polaris™ GEN II Series 300 Package with P/N 00000791-3 Source | MC 402 02/08 |
| Variable Position & Tilt - 1" Baseplate Feedthrough | |||
| 3" | 00000957-1 | Polaris™ GEN II Series 300 Package with P/N 00000929-1 Source | MC 402 02/08 |
| 3" | 00000957-2 | Polaris™ GEN II Series 300 Package with P/N 00000929-2 Source | MC 402 02/08 |
| 3" | 00000957-3 | Polaris™ GEN II Series 300 Package with P/N 00000929-3 Source | MC 402 02/08 |
| Flange Mounted Variable Position With Shutter | |||
| 3" | 00000958-1 | Polaris™ GEN II Series 300 Package with P/N 00000938-1 Source | MC 402 02/08 |
| 3" | 00000958-2 | Polaris™ GEN II Series 300 Package with P/N 00000938-2 Source | MC 402 02/08 |
| 3" | 00000958-3 | Polaris™ GEN II Series 300 Package with P/N 00000938-3 Source | MC 402 02/08 |
| Flange Mounted Variable Position and Tilt With Shutter | |||
| 3" | 00000959-1 | Polaris™ GEN II Series 300 Package with P/N 00000943-1 Source | MC 402 02/08 |
| 3" | 00000959-2 | Polaris™ GEN II Series 300 Package with P/N 00000943-2 Source | MC 402 02/08 |
| 3" | 00000959-3 | Polaris™ GEN II Series 300 Package with P/N 00000943-3 Source | MC 402 02/08 |
Copyright © 1993-2008 Materials Science, Inc.
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