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Sputtering Sources, Sputtering Packages, Spare Parts & Accessories

 

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SCOPE OF DELIVERY - POLARIS™ GEN II SOURCES

bulletGas through the cathode body standard
bulletOne .060" thick C110 copper target backing plate
bulletOne target clamping ring (type must be specified when ordering)
bulletOne each 36” long 1/8" O.D. argon gas line and Swagelok union
bullet304 CRES KF-40 bulkhead clamp set and centering ring
bulletDocumentation set on CD including: instruction manual, interface control drawing, assembly drawing, target, backing plate and target bonding specifications and drawings, magnet module field profiles

 

SIZE PART NUMBER DESCRIPTION SALES BROCHURE
      Basic Sputtering Source  
2" 00000778-1   2” Internal Mount Sputtering Source with bulkhead KF-40 Flange and
  target clamping ring for 0.125" or 0.188" thick clamped targets.
MC 600 02/08
451002 02/08
2" 00000778-2   2” Internal Mount Sputtering Source with bulkhead KF-40 Flange and
  target clamping ring for 0.25" thick directly water-cooled targets.
MC 600 02/08
451002 02/08
2" 00000778-3-125   2” Internal Mount Sputtering Source with bulkhead KF-40 Flange and
  target clamping ring for 0.125" thick bonded targets.
MC 600 02/08
451002 02/08
2" 00000778-3-188   2” Internal Mount Cathode with bulkhead KF-40 Flange & target clamping ring for
  0.188" thick bonded targets.
MC 600 02/08
451002 02/08
     Fixed Position 1" Baseplate RF/DC Feedthrough MC 600 02/08
451002 02/08
2" 00000784  2" Internal Mount with KF-40 to 1" baseplate RF/DC feedthrough assembly.  Specify
 desired target arrangement noted for basic sputtering source when ordering.
MC 600 02/08
451002 02/08
     Fixed Position 1" Baseplate DC Feedthrough  
2" 00000786  2" Internal Mount with KF-40 to 1" baseplate DC feedthrough assembly.  Specify
 desired target arrangement noted for basic sputtering source when ordering.
MC 600 02/08
451002 02/08
     Variable Position - 1" Baseplate Feedthrough MC 600 02/08
451002 02/08
2" 00000785-1  2" Internal Mount RF/DC with variable position 3/4" OD x 12" long tube.  Includes
 1" baseplate feedthrough.  Specify desired target arrangement noted for basic
 sputtering source when ordering.
MC 600 02/08
451002 02/08
2" 00000785-2  2" Internal Mount RF/DC with variable position 3/4" OD x 18" long tube.  Includes
 1" baseplate feedthrough.  Specify desired target arrangement noted for basic
 sputtering source when ordering.
MC 600 02/08
451002 02/08
2" 00000785-3  2" Internal Mount RF/DC with variable position 3/4" OD x 24" long tube.  Includes
 1" baseplate feedthrough.  Specify desired target arrangement noted for basic
 sputtering source when ordering.
MC 600 02/08
451002 02/08
     Variable Position & Tilt - 1" Baseplate Feedthrough  
2" 00000928-1  2" Internal Mount RF/DC with variable position 3/4" OD x 12" long tube and 30°
 from center tilt mechanism (60° included angle).  Includes
 1" baseplate feedthrough.  Specify desired target arrangement noted for basic
 sputtering source when ordering.
MC 600 02/08
451002 02/08
2" 00000928-2  2" Internal Mount RF/DC with variable position 3/4" OD x 18" long tube and 30°
 from center tilt mechanism (60° included angle).  Includes
 1" baseplate feedthrough.  Specify desired target arrangement noted for basic
 sputtering source when ordering.
MC 600 02/08
451002 02/08
2" 00000928-3  2" Internal Mount RF/DC with variable position 3/4" OD x 24" long tube and 30°
 from center tilt mechanism (60° included angle).  Includes
 1" baseplate feedthrough.  Specify desired target arrangement noted for basic
 sputtering source when ordering.
MC 600 02/08
451002 02/08
     Flange Mounted Variable Position With Shutter  
2" 00000931-1  2" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube
 compression fitting.  Variable position 3/4" OD x 12" long tube.  Includes manual
 swing shutter.  Specify desired target arrangement noted for basic sputtering
 source when ordering.
MC 600 02/08
451002 02/08
2" 00000931-2  2" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube
 compression fitting.  Variable position 3/4" OD x 18" long tube.  Includes manual
 swing shutter.  Specify desired target arrangement noted for basic sputtering
 source when ordering.
MC 600 02/08
451002 02/08
2" 00000931-3  2" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube
 compression fitting.  Variable position 3/4" OD x 24" long tube.  Includes manual
 swing shutter.  Specify desired target arrangement noted for basic sputtering
 source when ordering.
MC 600 02/08
451002 02/08
     Flange Mounted Variable Position and Tilt With Shutter  
2" 00000947-1  2" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube
 compression fitting.  Variable position 3/4" OD x 12" long tube and 30°
 from center tilt mechanism (60° included angle).  Includes manual  swing shutter.
 Specify desired target arrangement noted for basic sputtering source when
 ordering.
MC 600 02/08
451002 02/08
2" 00000947-2  2" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube
 compression fitting.  Variable position 3/4" OD x 18" long tube and 30°
 from center tilt mechanism (60° included angle).  Includes manual  swing shutter.
 Specify desired target arrangement noted for basic sputtering source when
 ordering.
MC 600 02/08
451002 02/08
2" 00000947-3  2" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube
 compression fitting.  Variable position 3/4" OD x 24" long tube and 30°
 from center tilt mechanism (60° included angle).  Includes manual  swing shutter.
 Specify desired target arrangement noted for basic sputtering source when
 ordering.
MC 600 02/08
451002 02/08
       
      Basic Sputtering Source  
3" 00000697-1   3” Internal Mount Cathode with bulkhead KF-40 Flange & target clamping ring for
  0.125" or 0.188" thick clamped targets
.
MC 600 02/08
451002 02/08
3" 00000697-2   3” Internal Mount Cathode with bulkhead KF-40 Flange & target clamping ring for
  0.25" thick directly water-cooled targets
.
MC 600 02/08
451002 02/08
3" 00000697-3-125   3” Internal Mount Cathode with bulkhead KF-40 Flange & target clamping ring for
  0.125" thick bonded targets
.
MC 600 02/08
451002 02/08
3" 00000697-3-188   3” Internal Mount Cathode with bulkhead KF-40 Flange & target clamping ring for
  0.188" thick bonded targets.
MC 600 02/08
451002 02/08
     Fixed Position 1" Baseplate RF/DC Feedthrough MC 600 02/08
451002 02/08
3" 00000719  3" Internal Mount with KF-40 to 1" baseplate RF/DC feedthrough assembly.  Specify
 desired target arrangement noted for basic sputtering source when ordering.
MC 600 02/08
451002 02/08
     Fixed Position 1" Baseplate DC Feedthrough  
3" 00000792  3" Internal Mount with KF-40 to 1" baseplate DC feedthrough assembly.  Specify
 desired target arrangement noted for basic sputtering source when ordering.
MC 600 02/08
451002 02/08
     Variable Position - 1" Baseplate Feedthrough MC 600 02/08
451002 02/08
3" 00000791-1  3" Internal Mount RF/DC with variable position 3/4" OD x 12" long tube.  Includes
 1" baseplate feedthrough.  Specify desired target arrangement noted for basic
 sputtering source when ordering.
MC 600 02/08
451002 02/08
3" 00000791-2  3" Internal Mount RF/DC with variable position 3/4" OD x 18" long tube.  Includes
 1" baseplate feedthrough.  Specify desired target arrangement noted for basic
 sputtering source when ordering.
MC 600 02/08
451002 02/08
3" 00000791-3  3" Internal Mount RF/DC with variable position 3/4" OD x 24" long tube.  Includes
 1" baseplate feedthrough.  Specify desired target arrangement noted for basic
 sputtering source when ordering.
MC 600 02/08
451002 02/08
     Variable Position & Tilt - 1" Baseplate Feedthrough  
3" 00000929-1  3" Internal Mount RF/DC with variable position 3/4" OD x 12" long tube and 30°
 from center tilt mechanism (60° included angle).  Includes
 1" baseplate feedthrough.  Specify desired target arrangement noted for basic
 sputtering source when ordering.
MC 600 02/08
451002 02/08
3" 00000929-2  3" Internal Mount RF/DC with variable position 3/4" OD x 18" long tube and 30°
 from center tilt mechanism (60° included angle).  Includes
 1" baseplate feedthrough.  Specify desired target arrangement noted for basic
 sputtering source when ordering.
MC 600 02/08
451002 02/08
3" 00000929-3  3" Internal Mount RF/DC with variable position 3/4" OD x 24" long tube and 30°
 from center tilt mechanism (60° included angle).  Includes
 1" baseplate feedthrough.  Specify desired target arrangement noted for basic
 sputtering source when ordering.
MC 600 02/08
451002 02/08
     Flange Mounted Variable Position With Shutter  
3" 00000938-1  3" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube
 compression fitting.  Variable position 3/4" OD x 12" long tube.  Includes manual
 swing shutter.  Specify desired target arrangement noted for basic sputtering
 source when ordering.
MC 600 02/08
451002 02/08
3" 00000938-2  3" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube
 compression fitting.  Variable position 3/4" OD x 18" long tube.  Includes manual
 swing shutter.  Specify desired target arrangement noted for basic sputtering
 source when ordering.
MC 600 02/08
451002 02/08
3" 00000938-3  3" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube
 compression fitting.  Variable position 3/4" OD x 24" long tube.  Includes manual
 swing shutter.  Specify desired target arrangement noted for basic sputtering
 source when ordering.
MC 600 02/08
451002 02/08
     Flange Mounted Variable Position and Tilt With Shutter  
3" 00000943-1  3" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube
 compression fitting.  Variable position 3/4" OD x 12" long tube and 30°
 from center tilt mechanism (60° included angle).  Includes manual  swing shutter.
 Specify desired target arrangement noted for basic sputtering source when
 ordering.
MC 600 02/08
451002 02/08
3" 00000943-2  3" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube
 compression fitting.  Variable position 3/4" OD x 18" long tube and 30°
 from center tilt mechanism (60° included angle).  Includes manual  swing shutter.
 Specify desired target arrangement noted for basic sputtering source when
 ordering.
MC 600 02/08
451002 02/08
3" 00000943-3  3" Internal Mount RF/DC mounted on 8" OD CF flange with 3/4" OD tube
 compression fitting.  Variable position 3/4" OD x 24" long tube and 30°
 from center tilt mechanism (60° included angle).  Includes manual  swing shutter.
 Specify desired target arrangement noted for basic sputtering source when
 ordering.
MC 600 02/08
451002 02/08
       
    Options for 2" & 3" Polaris Sputtering Sources  
  -  Substitute 2.75" OD CF flange with 3/4" compression fitting for 1" baseplate
 feedthrough.
-
  00000451  Substitute 6" OD CF flange with 3/4" compression fitting for 1" baseplate
 feedthrough (2" sources only).
-
  -  Add pneumatic cylinder with solenoid control valve to manual shutter feedthrough. -
  -  Replace swing-type shutter with flip-up type shutter. -
  -  Replace 1" baseplate feedthrough with 8" OD CF flange with 3/4" OD compression
 fitting.
-
  -  Eliminate variable positioning on flange mount assemblies with tilt capability and/or
 shutters.  Specify face of target to inside surface of flange.
-
  -  Custom array of sources, shutters and other accessories mounted on single
 flange.
-
       
      Power Cables  
  00000102-3  36"  Long RG-393 RF Power Cable Assembly, Male HN Connector Both Ends -
  00000102-4  48"  Long RG-393 RF Power Cable Assembly, Male HN Connector Both Ends -
  00000102-5  60"  Long RG-393 RF Power Cable Assembly, Male HN Connector Both Ends -
  00000102-6  72"  Long RG-393 RF Power Cable Assembly, Male HN Connector Both Ends -
      Target Backing Plates  
2" 00000772  0.060” thick copper backing plate -
3" 00000711  0.060” thick copper backing plate -
      Target Clamping Rings  
2" 00000775-1   0.125” thick bonded targets  -
2" 00000775-2   0.188” thick bonded targets  -
2" 00000771   0.125 - 0.188" thick clamped targets  -
2" 00000779   0.250” thick directly water cooled targets -
3" 00000763-1   0.125” thick bonded targets  -
3" 00000763-2   0.188” thick bonded targets  -
3" 00000571   0.125 - 0.188" thick clamped targets  -
3" 00000762   0.250” thick directly water cooled targets -
    Vacuum Hardware  
  00000016 Bulkhead KF-40 Clamp Set, 304 CRES -
  00000099 KF-40 Clamping Ring -
  00000100-3 KF-40 Centering Ring with Viton O-Ring -
    Magnet Module -
2" 00000782 Magnet Module -
3 00000573 Magnet Module -

 

SCOPE OF DELIVERY - POLARIS™ GEN II SERIES 300 RF SPUTTERING PACKAGES
bulletPolaris™ GEN II Internal Mount Sputtering Source, as defined above
bullet19" Rack Mount with 13.56 MHz Power Supply and Integrated Manual Matching Network
bulletRG-393 Output Cable
bulletDocumentation set on CD including: instruction manuals for source and power generation system, interface control drawing, assembly drawing, target, backing plate and target bonding specifications and drawings, magnet module field profiles

 

SIZE PART NUMBER DESCRIPTION SALES BROCHURE
     Fixed Position 1" Baseplate RF/DC Feedthrough  
2" 00000766  Polaris™ GEN II Series 300 Package with P/N 00000784 Source MC 402 02/08
     Variable Position - 1" Baseplate Feedthrough  
2" 00000951-1  Polaris™ GEN II Series 300 Package with P/N 00000785-1 Source MC 402 02/08
2" 00000951-2  Polaris™ GEN II Series 300 Package with P/N 00000785-2 Source MC 402 02/08
2" 00000951-3  Polaris™ GEN II Series 300 Package with P/N 00000785-3 Source MC 402 02/08
     Variable Position & Tilt - 1" Baseplate Feedthrough  
2" 00000952-1  Polaris™ GEN II Series 300 Package with P/N 00000928-1 Source MC 402 02/08
2" 00000952-2  Polaris™ GEN II Series 300 Package with P/N 00000928-2 Source MC 402 02/08
2" 00000952-3  Polaris™ GEN II Series 300 Package with P/N 00000928-3 Source MC 402 02/08
     Flange Mounted Variable Position With Shutter  
2" 00000953-1  Polaris™ GEN II Series 300 Package with P/N 00000931-1 Source MC 402 02/08
2" 00000953-2  Polaris™ GEN II Series 300 Package with P/N 00000931-2 Source MC 402 02/08
2" 00000953-3  Polaris™ GEN II Series 300 Package with P/N 00000931-3 Source MC 402 02/08
     Flange Mounted Variable Position and Tilt With Shutter  
2" 00000954-1  Polaris™ GEN II Series 300 Package with P/N 00000947-1 Source MC 402 02/08
2" 00000954-2  Polaris™ GEN II Series 300 Package with P/N 00000947-2 Source MC 402 02/08
2" 00000954-3  Polaris™ GEN II Series 300 Package with P/N 00000947-3 Source MC 402 02/08
       
     Fixed Position 1" Baseplate RF/DC Feedthrough  
3' 00000767  Polaris™ GEN II Series 300 Package with P/N 00000719 Source MC 402 02/08
     Variable Position - 1" Baseplate Feedthrough  
3" 00000956-1  Polaris™ GEN II Series 300 Package with P/N 00000791-1 Source MC 402 02/08
3" 00000956-2  Polaris™ GEN II Series 300 Package with P/N 00000791-2 Source MC 402 02/08
3" 00000956-3  Polaris™ GEN II Series 300 Package with P/N 00000791-3 Source MC 402 02/08
     Variable Position & Tilt - 1" Baseplate Feedthrough  
3" 00000957-1  Polaris™ GEN II Series 300 Package with P/N 00000929-1 Source MC 402 02/08
3" 00000957-2  Polaris™ GEN II Series 300 Package with P/N 00000929-2 Source MC 402 02/08
3" 00000957-3  Polaris™ GEN II Series 300 Package with P/N 00000929-3 Source MC 402 02/08
     Flange Mounted Variable Position With Shutter  
3" 00000958-1  Polaris™ GEN II Series 300 Package with P/N 00000938-1 Source MC 402 02/08
3" 00000958-2  Polaris™ GEN II Series 300 Package with P/N 00000938-2 Source MC 402 02/08
3" 00000958-3  Polaris™ GEN II Series 300 Package with P/N 00000938-3 Source MC 402 02/08
     Flange Mounted Variable Position and Tilt With Shutter  
3" 00000959-1  Polaris™ GEN II Series 300 Package with P/N 00000943-1 Source MC 402 02/08
3" 00000959-2  Polaris™ GEN II Series 300 Package with P/N 00000943-2 Source MC 402 02/08
3" 00000959-3  Polaris™ GEN II Series 300 Package with P/N 00000943-3 Source MC 402 02/08
 

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Last modified: April 04, 2008